Leonova L. A. Liliya Aleksandrovna, Boytsova E. L. Elena Lvovna, & Pustovalova A. A. Alla Aleksandrovna. (2016). The study of titanium oxynitride coatings solubility deposited by reactive magnetron sputtering. 2016. https://doi.org/10.1088/1757-899X/135/1/012026
Chicago Style (17th ed.) CitationLeonova L. A. Liliya Aleksandrovna, Boytsova E. L. Elena Lvovna, and Pustovalova A. A. Alla Aleksandrovna. The Study of Titanium Oxynitride Coatings Solubility Deposited by Reactive Magnetron Sputtering. 2016, 2016. https://doi.org/10.1088/1757-899X/135/1/012026.
MLA (9th ed.) CitationLeonova L. A. Liliya Aleksandrovna, et al. The Study of Titanium Oxynitride Coatings Solubility Deposited by Reactive Magnetron Sputtering. 2016, 2016. https://doi.org/10.1088/1757-899X/135/1/012026.