Plasma immersion ion charge state and mass spectrometer

Plasma immersion ion charge state and mass spectrometer

Bibliographic Details
Parent link:Review of Scientific Instruments
Vol. 85, iss. 2.— 2014.— [02A733, 3 p.]
Corporate Author: Национальный исследовательский Томский политехнический университет Физико-технический институт Кафедра прикладной физики (№ 12)
Other Authors: Stepanov I. B. Igor Borisovich, Ryabchikov A. I. Aleksandr Ilyich, Ananin P. S. Petr Semenovich, Dektyarev S. V. Sergey Valentinovich, Sivin D. O. Denis Olegovich, Verigin D. A. Dan Aleksandrovich
Summary:Title screen
Investigation results of charge state of monocomponent plasma of Ti, Zr, W, and N, as well as that of multicomponent metal plasma of Ti/Zr (50/50 at.%) using plasma-immersion time-of-flightspectrometer are presented in the paper. The case of pressure impact in the working chamber on the ion charge state of combined metal (Ti) and gas-discharge (N) plasma is considered.
Режим доступа: по договору с организацией-держателем ресурса
Language:English
Published: 2014
Subjects:
электронный ресурс
труды учёных ТПУ
Online Access:http://dx.doi.org/10.1063/1.4852219
Format: Electronic Book Chapter
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=649334

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