Plasma immersion ion charge state and mass spectrometer; Review of Scientific Instruments; Vol. 85, iss. 2
| Parent link: | Review of Scientific Instruments Vol. 85, iss. 2.— 2014.— [02A733, 3 p.] |
|---|---|
| Autor corporatiu: | |
| Altres autors: | , , , , , |
| Sumari: | Title screen Investigation results of charge state of monocomponent plasma of Ti, Zr, W, and N, as well as that of multicomponent metal plasma of Ti/Zr (50/50 at.%) using plasma-immersion time-of-flightspectrometer are presented in the paper. The case of pressure impact in the working chamber on the ion charge state of combined metal (Ti) and gas-discharge (N) plasma is considered. Режим доступа: по договору с организацией-держателем ресурса |
| Idioma: | anglès |
| Publicat: |
2014
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| Matèries: | |
| Accés en línia: | http://dx.doi.org/10.1063/1.4852219 |
| Format: | MixedMaterials Electrònic Capítol de llibre |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=649334 |
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| 200 | 1 | |a Plasma immersion ion charge state and mass spectrometer |f I. B. Stepanov [et al.] | |
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| 300 | |a Title screen | ||
| 320 | |a [References: 6 tit.] | ||
| 330 | |a Investigation results of charge state of monocomponent plasma of Ti, Zr, W, and N, as well as that of multicomponent metal plasma of Ti/Zr (50/50 at.%) using plasma-immersion time-of-flightspectrometer are presented in the paper. The case of pressure impact in the working chamber on the ion charge state of combined metal (Ti) and gas-discharge (N) plasma is considered. | ||
| 333 | |a Режим доступа: по договору с организацией-держателем ресурса | ||
| 461 | |t Review of Scientific Instruments | ||
| 463 | |t Vol. 85, iss. 2 |v [02A733, 3 p.] |d 2014 | ||
| 610 | 1 | |a электронный ресурс | |
| 610 | 1 | |a труды учёных ТПУ | |
| 701 | 1 | |a Stepanov |b I. B. |c physicist |c Head of the laboratory of Tomsk Polytechnic University, Doctor of technical sciences |f 1968- |g Igor Borisovich |3 (RuTPU)RU\TPU\pers\34218 |9 17749 | |
| 701 | 1 | |a Ryabchikov |b A. I. |c Professor of Tomsk Polytechnic University, Doctor of physical and mathematical sciences |c physicist |f 1950- |g Aleksandr Ilyich |3 (RuTPU)RU\TPU\pers\30912 |9 15150 | |
| 701 | 1 | |a Ananin |b P. S. |c physicist |c senior researcher of Tomsk Polytechnic University, candidate of physical and mathematical sciences |f 1942- |g Petr Semenovich |3 (RuTPU)RU\TPU\pers\35673 |9 18834 | |
| 701 | 1 | |a Dektyarev |b S. V. |c physicist |c design engineer of Tomsk Polytechnic University |f 1957- |g Sergey Valentinovich |3 (RuTPU)RU\TPU\pers\35672 |9 18833 | |
| 701 | 1 | |a Sivin |b D. O. |c physicist |c Senior researcher of Tomsk Polytechnic University, Candidate of technical sciences |f 1978- |g Denis Olegovich |3 (RuTPU)RU\TPU\pers\34240 |9 17771 | |
| 701 | 1 | |a Verigin |b D. A. |c physicist |c Senior Lecturer of Tomsk Polytechnic University, Candidate of Sciences |f 1984- |g Dan Aleksandrovich |3 (RuTPU)RU\TPU\pers\31211 |9 15407 | |
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