Plasma immersion ion charge state and mass spectrometer

التفاصيل البيبلوغرافية
Parent link:Review of Scientific Instruments
Vol. 85, iss. 2.— 2014.— [02A733, 3 p.]
مؤلف مشترك: Национальный исследовательский Томский политехнический университет Физико-технический институт Кафедра прикладной физики (№ 12)
مؤلفون آخرون: Stepanov I. B. Igor Borisovich, Ryabchikov A. I. Aleksandr Ilyich, Ananin P. S. Petr Semenovich, Dektyarev S. V. Sergey Valentinovich, Sivin D. O. Denis Olegovich, Verigin D. A. Dan Aleksandrovich
الملخص:Title screen
Investigation results of charge state of monocomponent plasma of Ti, Zr, W, and N, as well as that of multicomponent metal plasma of Ti/Zr (50/50 at.%) using plasma-immersion time-of-flightspectrometer are presented in the paper. The case of pressure impact in the working chamber on the ion charge state of combined metal (Ti) and gas-discharge (N) plasma is considered.
Режим доступа: по договору с организацией-держателем ресурса
اللغة:الإنجليزية
منشور في: 2014
الموضوعات:
الوصول للمادة أونلاين:http://dx.doi.org/10.1063/1.4852219
التنسيق: الكتروني فصل الكتاب
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=649334
الوصف
الملخص:Title screen
Investigation results of charge state of monocomponent plasma of Ti, Zr, W, and N, as well as that of multicomponent metal plasma of Ti/Zr (50/50 at.%) using plasma-immersion time-of-flightspectrometer are presented in the paper. The case of pressure impact in the working chamber on the ion charge state of combined metal (Ti) and gas-discharge (N) plasma is considered.
Режим доступа: по договору с организацией-держателем ресурса
DOI:10.1063/1.4852219