Investigation of filtered vacuum arc plasma application for TiAlN and TiSiB coatings deposition using ion beam and plasma material processing

Investigation of filtered vacuum arc plasma application for TiAlN and TiSiB coatings deposition using ion beam and plasma material processing

书目详细资料
Parent link:	Surface and Coatings Technology: Scientific Journal Vol. 296.— 2016.— [P. 20-25]
企业作者:	Национальный исследовательский Томский политехнический университет Физико-технический институт Лаборатория № 22, Национальный исследовательский Томский политехнический университет Физико-технический институт Центр измерений свойств материалов
其他作者:	Stepanov I. B. Igor Borisovich, Ryabchikov A. I. Aleksandr Ilyich, Ananin P. S. Petr Semenovich, Bumagina A. I. Anna Ivanovna, Shevelev A. E. Aleksey Eduardovich, Shulepov I. A. Ivan Anisimovich, Sivin D. O. Denis Olegovich
总结:	Title screen The paper studies the formation of TiAlN and TiSiB coating by macroparticle filtered vacuum arc plasma, high-frequency short-pulsed plasma immersion and repetitively pulsed high-current ion beam implantation. A new design of an axially symmetric plasma filter is described. The samples were pretreated by a repetitively pulsed high-current ion beam and plasma source “Rainbow-5” and high-frequency (100 kHz) short-pulsed (8 ?s) metal plasma immersion ion surface treatment. Macroparticle-filtered metal plasma deposition was realized under ion beam mixing or using high-frequency short-pulsed negative bias. The work yields the surface morphology, elemental composition, and mechanical properties of coatings. Режим доступа: по договору с организацией-держателем ресурса
出版:	2016
主题:	электронный ресурс труды учёных ТПУ плазменные фильтры вакуумно-дуговая плазма ионная имплантация покрытия
在线阅读:	http://dx.doi.org/10.1016/j.surfcoat.2016.04.012
格式:	电子本书章节
KOHA link:	https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=649325

因特网

http://dx.doi.org/10.1016/j.surfcoat.2016.04.012