Investigation of filtered vacuum arc plasma application for TiAlN and TiSiB coatings deposition using ion beam and plasma material processing
| Parent link: | Surface and Coatings Technology: Scientific Journal Vol. 296.— 2016.— [P. 20-25] |
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| Corporate Authors: | , |
| Andre forfattere: | , , , , , , |
| Summary: | Title screen The paper studies the formation of TiAlN and TiSiB coating by macroparticle filtered vacuum arc plasma, high-frequency short-pulsed plasma immersion and repetitively pulsed high-current ion beam implantation. A new design of an axially symmetric plasma filter is described. The samples were pretreated by a repetitively pulsed high-current ion beam and plasma source “Rainbow-5” and high-frequency (100 kHz) short-pulsed (8 ?s) metal plasma immersion ion surface treatment. Macroparticle-filtered metal plasma deposition was realized under ion beam mixing or using high-frequency short-pulsed negative bias. The work yields the surface morphology, elemental composition, and mechanical properties of coatings. Режим доступа: по договору с организацией-держателем ресурса |
| Udgivet: |
2016
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| Fag: | |
| Online adgang: | http://dx.doi.org/10.1016/j.surfcoat.2016.04.012 |
| Format: | Electronisk Book Chapter |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=649325 |