Investigation of filtered vacuum arc plasma application for TiAlN and TiSiB coatings deposition using ion beam and plasma material processing

Investigation of filtered vacuum arc plasma application for TiAlN and TiSiB coatings deposition using ion beam and plasma material processing

Bibliographic Details
Parent link:Surface and Coatings Technology: Scientific Journal
Vol. 296.— 2016.— [P. 20-25]
Corporate Authors: Национальный исследовательский Томский политехнический университет Физико-технический институт Лаборатория № 22, Национальный исследовательский Томский политехнический университет Физико-технический институт Центр измерений свойств материалов
Other Authors: Stepanov I. B. Igor Borisovich, Ryabchikov A. I. Aleksandr Ilyich, Ananin P. S. Petr Semenovich, Bumagina A. I. Anna Ivanovna, Shevelev A. E. Aleksey Eduardovich, Shulepov I. A. Ivan Anisimovich, Sivin D. O. Denis Olegovich
Summary:Title screen
The paper studies the formation of TiAlN and TiSiB coating by macroparticle filtered vacuum arc plasma, high-frequency short-pulsed plasma immersion and repetitively pulsed high-current ion beam implantation. A new design of an axially symmetric plasma filter is described. The samples were pretreated by a repetitively pulsed high-current ion beam and plasma source “Rainbow-5” and high-frequency (100 kHz) short-pulsed (8 ?s) metal plasma immersion ion surface treatment. Macroparticle-filtered metal plasma deposition was realized under ion beam mixing or using high-frequency short-pulsed negative bias. The work yields the surface morphology, elemental composition, and mechanical properties of coatings.
Режим доступа: по договору с организацией-держателем ресурса
Language:English
Published: 2016
Subjects:
электронный ресурс
труды учёных ТПУ
плазменные фильтры
вакуумно-дуговая плазма
ионная имплантация
покрытия
Online Access:http://dx.doi.org/10.1016/j.surfcoat.2016.04.012
Format: Electronic Book Chapter
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=649325

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