Investigation of filtered vacuum arc plasma application for TiAlN and TiSiB coatings deposition using ion beam and plasma material processing; Surface and Coatings Technology; Vol. 296

Investigation of filtered vacuum arc plasma application for TiAlN and TiSiB coatings deposition using ion beam and plasma material processing; Surface and Coatings Technology; Vol. 296

Sonraí bibleagrafaíochta
Parent link:Surface and Coatings Technology: Scientific Journal
Vol. 296.— 2016.— [P. 20-25]
Údair chorparáideacha: Национальный исследовательский Томский политехнический университет Физико-технический институт Лаборатория № 22, Национальный исследовательский Томский политехнический университет Физико-технический институт Центр измерений свойств материалов
Rannpháirtithe: Stepanov I. B. Igor Borisovich, Ryabchikov A. I. Aleksandr Ilyich, Ananin P. S. Petr Semenovich, Bumagina A. I. Anna Ivanovna, Shevelev A. E. Aleksey Eduardovich, Shulepov I. A. Ivan Anisimovich, Sivin D. O. Denis Olegovich
Achoimre:Title screen
The paper studies the formation of TiAlN and TiSiB coating by macroparticle filtered vacuum arc plasma, high-frequency short-pulsed plasma immersion and repetitively pulsed high-current ion beam implantation. A new design of an axially symmetric plasma filter is described. The samples were pretreated by a repetitively pulsed high-current ion beam and plasma source “Rainbow-5” and high-frequency (100 kHz) short-pulsed (8 ?s) metal plasma immersion ion surface treatment. Macroparticle-filtered metal plasma deposition was realized under ion beam mixing or using high-frequency short-pulsed negative bias. The work yields the surface morphology, elemental composition, and mechanical properties of coatings.
Режим доступа: по договору с организацией-держателем ресурса
Teanga:Béarla
Foilsithe / Cruthaithe: 2016
Ábhair:
электронный ресурс
труды учёных ТПУ
плазменные фильтры
вакуумно-дуговая плазма
ионная имплантация
покрытия
Rochtain ar líne:http://dx.doi.org/10.1016/j.surfcoat.2016.04.012
Formáid: Leictreonach Caibidil leabhair
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=649325
Cur síos
Achoimre:Title screen
The paper studies the formation of TiAlN and TiSiB coating by macroparticle filtered vacuum arc plasma, high-frequency short-pulsed plasma immersion and repetitively pulsed high-current ion beam implantation. A new design of an axially symmetric plasma filter is described. The samples were pretreated by a repetitively pulsed high-current ion beam and plasma source “Rainbow-5” and high-frequency (100 kHz) short-pulsed (8 ?s) metal plasma immersion ion surface treatment. Macroparticle-filtered metal plasma deposition was realized under ion beam mixing or using high-frequency short-pulsed negative bias. The work yields the surface morphology, elemental composition, and mechanical properties of coatings.
Режим доступа: по договору с организацией-держателем ресурса
DOI:10.1016/j.surfcoat.2016.04.012

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