Production of a large-volume plasma by a hot-cathode arc; Russian Physics Journal; Vol. 37, iss. 3

Production of a large-volume plasma by a hot-cathode arc

Dettagli Bibliografici
Parent link:Russian Physics Journal.— , 1965-
Vol. 37, iss. 3.— 1993.— [P. 295-299]
Autore principale: Borisov D. P.
Altri autori: Koval N. N. Nikolay Nikolaevich, Shchanin P. M.
Riassunto:Title screen
Probe measurements reveal that the plasma produced by a hot-cathode arc contains two groups of electrons, with temperatures ≈4 and 10 eV, with a density of 1010–1011 cm-3. These electrons are distributed uniformly over a volume of 0.2 m3. The discharge voltage is found as a function of the gas pressure and the heater current. Low-temperature regimes of the deposition of TiN coatings on metals and insulators after a plasma processing of the articles are described. The design of the discharge system is discussed.
Режим доступа: по договору с организацией-держателем ресурса
Lingua:inglese
Pubblicazione: 1993
Soggetti:
электронный ресурс
труды учёных ТПУ
плазма
катодная дуга
Accesso online:http://dx.doi.org/10.1007/BF00565740
Natura: Elettronico Capitolo di libro
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=649181

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