Production of a large-volume plasma by a hot-cathode arc
| Parent link: | Russian Physics Journal.— , 1965- Vol. 37, iss. 3.— 1993.— [P. 295-299] |
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| Prif Awdur: | |
| Awduron Eraill: | , |
| Crynodeb: | Title screen Probe measurements reveal that the plasma produced by a hot-cathode arc contains two groups of electrons, with temperatures ≈4 and 10 eV, with a density of 1010–1011 cm-3. These electrons are distributed uniformly over a volume of 0.2 m3. The discharge voltage is found as a function of the gas pressure and the heater current. Low-temperature regimes of the deposition of TiN coatings on metals and insulators after a plasma processing of the articles are described. The design of the discharge system is discussed. Режим доступа: по договору с организацией-держателем ресурса |
| Iaith: | Saesneg |
| Cyhoeddwyd: |
1993
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| Pynciau: | |
| Mynediad Ar-lein: | http://dx.doi.org/10.1007/BF00565740 |
| Fformat: | Electronig Pennod Llyfr |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=649181 |
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| 200 | 1 | |a Production of a large-volume plasma by a hot-cathode arc |f D. P. Borisov, N. N. Koval, P. M. Shchanin | |
| 203 | |a Text |c electronic | ||
| 300 | |a Title screen | ||
| 320 | |a [References: p. 299 (8 tit.)] | ||
| 330 | |a Probe measurements reveal that the plasma produced by a hot-cathode arc contains two groups of electrons, with temperatures ≈4 and 10 eV, with a density of 1010–1011 cm-3. These electrons are distributed uniformly over a volume of 0.2 m3. The discharge voltage is found as a function of the gas pressure and the heater current. Low-temperature regimes of the deposition of TiN coatings on metals and insulators after a plasma processing of the articles are described. The design of the discharge system is discussed. | ||
| 333 | |a Режим доступа: по договору с организацией-держателем ресурса | ||
| 461 | |t Russian Physics Journal |d 1965- | ||
| 463 | |t Vol. 37, iss. 3 |v [P. 295-299] |d 1993 | ||
| 610 | 1 | |a электронный ресурс | |
| 610 | 1 | |a труды учёных ТПУ | |
| 610 | 1 | |a плазма | |
| 610 | 1 | |a катодная дуга | |
| 700 | 1 | |a Borisov |b D. P. | |
| 701 | 1 | |a Koval |b N. N. |c specialist in the field of electronics |c Professor of Tomsk Polytechnic University, Doctor of technical sciences |f 1948- |g Nikolay Nikolaevich |3 (RuTPU)RU\TPU\pers\34748 |9 18098 | |
| 701 | 1 | |a Shchanin |b P. M. | |
| 801 | 2 | |a RU |b 63413507 |c 20161207 |g RCR | |
| 856 | 4 | |u http://dx.doi.org/10.1007/BF00565740 | |
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