Production of a large-volume plasma by a hot-cathode arc
| Parent link: | Russian Physics Journal.— , 1965- Vol. 37, iss. 3.— 1993.— [P. 295-299] |
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| Autor principal: | |
| Altres autors: | , |
| Sumari: | Title screen Probe measurements reveal that the plasma produced by a hot-cathode arc contains two groups of electrons, with temperatures ≈4 and 10 eV, with a density of 1010–1011 cm-3. These electrons are distributed uniformly over a volume of 0.2 m3. The discharge voltage is found as a function of the gas pressure and the heater current. Low-temperature regimes of the deposition of TiN coatings on metals and insulators after a plasma processing of the articles are described. The design of the discharge system is discussed. Режим доступа: по договору с организацией-держателем ресурса |
| Idioma: | anglès |
| Publicat: |
1993
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| Matèries: | |
| Accés en línia: | http://dx.doi.org/10.1007/BF00565740 |
| Format: | Electrònic Capítol de llibre |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=649181 |
| Sumari: | Title screen Probe measurements reveal that the plasma produced by a hot-cathode arc contains two groups of electrons, with temperatures ≈4 and 10 eV, with a density of 1010–1011 cm-3. These electrons are distributed uniformly over a volume of 0.2 m3. The discharge voltage is found as a function of the gas pressure and the heater current. Low-temperature regimes of the deposition of TiN coatings on metals and insulators after a plasma processing of the articles are described. The design of the discharge system is discussed. Режим доступа: по договору с организацией-держателем ресурса |
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| DOI: | 10.1007/BF00565740 |