Generation of Gas Discharge Plasma by an Arc Source with a Cold Hollow Cathode

Generation of Gas Discharge Plasma by an Arc Source with a Cold Hollow Cathode

Bibliographic Details
Parent link:Instruments and Experimental Techniques.— , 2000-
Vol. 48, № 3.— 2005.— [P. 328-332]
Main Author: Schanin P. M.
Corporate Author: Национальный исследовательский Томский политехнический университет (ТПУ)
Other Authors: Koval N. N. Nikolay Nikolaevich, Akhmadeev Yu. Kh.
Summary:Title screen
The results from a study of an arc plasma source with a cold hollow cathode are presented. The source generates plasma with a density of ~1010 cm-3 in a volume of ~0.2 m3 at discharge currents of up to 150 A, an arc discharge operating voltage of 30–40 V, and a low pressure of 0.1–1 Pa. The motion of the cathode spot in the crossed electric and magnetic fields inside the hollow cathode and the cathode’s special design make it possible to eliminate almost completely the penetration of the sputtered cathode material into the working vacuum chamber.
Режим доступа: по договору с организацией-держателем ресурса
Published: 2005
Subjects:
электронный ресурс
труды учёных ТПУ
плазменный разряд
полный катод
генерация газа
Online Access:http://dx.doi.org/10.1007/s10786-005-0059-1
Format: Electronic Book Chapter
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=649138

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