Synthesis of multilayer polycrystalline diamond films using bias-induced secondary nucleation; Materials Letters; Vol. 139

Synthesis of multilayer polycrystalline diamond films using bias-induced secondary nucleation

التفاصيل البيبلوغرافية
Parent link:Materials Letters
Vol. 139.— 2015.— [P. 389-392]
المؤلف الرئيسي: Linnik S. A. Stepan Andreevich
مؤلف مشترك: Национальный исследовательский Томский политехнический университет Институт физики высоких технологий Лаборатория № 1
مؤلفون آخرون: Gaydaychuk A. V. Alexander Valerievich
الملخص:Title screen
We developed a new method for the synthesis of multilayer polycrystalline diamond films based on negative bias-induced secondary nucleation on a diamond surface induced by intense ion bombardment during CVD. The periodic formation of new nucleation centers and subsequent deposition allow us to synthesize films of up to 20 layers with a thickness up to 50 ?m. The multilayer diamond films were characterized by SEM and XRD. Dependence of the nucleation density on the methane concentration and current density was investigated. This technique provides multilayer diamond films for a wide range of applications.
Режим доступа: по договору с организацией-держателем ресурса
اللغة:الإنجليزية
منشور في: 2015
الموضوعات:
электронный ресурс
труды учёных ТПУ
углеродные материалы
тонкие пленки
многослойные структуры
الوصول للمادة أونلاين:http://dx.doi.org/10.1016/j.matlet.2014.10.142
التنسيق: الكتروني فصل الكتاب
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=649017

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