Generation of low-temperature gas discharge plasma in large vacuum volumes for plasma chemical processes
| Parent link: | Russian Journal of General Chemistry.— , 2001- Vol. 85, iss. 5.— 2015.— [P. 1326-1338] |
|---|---|
| Weitere Verfasser: | , , , , , , |
| Zusammenfassung: | Title screen In the paper the principles of generation of low temperature capacitively coupled in a vacuum chamber of a large size with the use of original low-pressure arc discharges are considered. The designs of plasma sources and their main parameters are described. Examples of effective use of the generated plasma in plasma chemical modification of the surfaces of materials and products are presented. Режим доступа: по договору с организацией-держателем ресурса |
| Sprache: | Englisch |
| Veröffentlicht: |
2015
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| Schlagworte: | |
| Online-Zugang: | http://dx.doi.org/10.1134/S1070363215050485 |
| Format: | Elektronisch Buchkapitel |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=648980 |
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| 200 | 1 | |a Generation of low-temperature gas discharge plasma in large vacuum volumes for plasma chemical processes |f N. N. Koval [et al.] | |
| 203 | |a Text |c electronic | ||
| 300 | |a Title screen | ||
| 320 | |a [References: p. 1338 (29 tit.)] | ||
| 330 | |a In the paper the principles of generation of low temperature capacitively coupled in a vacuum chamber of a large size with the use of original low-pressure arc discharges are considered. The designs of plasma sources and their main parameters are described. Examples of effective use of the generated plasma in plasma chemical modification of the surfaces of materials and products are presented. | ||
| 333 | |a Режим доступа: по договору с организацией-держателем ресурса | ||
| 461 | |t Russian Journal of General Chemistry |d 2001- | ||
| 463 | |t Vol. 85, iss. 5 |v [P. 1326-1338] |d 2015 | ||
| 610 | 1 | |a электронный ресурс | |
| 610 | 1 | |a труды учёных ТПУ | |
| 610 | 1 | |a низкотемпературная плазма | |
| 701 | 1 | |a Koval |b N. N. |c specialist in the field of electronics |c Professor of Tomsk Polytechnic University, Doctor of technical sciences |f 1948- |g Nikolay Nikolaevich |3 (RuTPU)RU\TPU\pers\34748 |9 18098 | |
| 701 | 1 | |a Ivanov |b Yu. F. |c physicist |c Professor of Tomsk Polytechnic University, Doctor of physical and mathematical sciences |f 1955- |g Yuriy Fedorovich |3 (RuTPU)RU\TPU\pers\33559 |9 17226 | |
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| 701 | 1 | |a Akhmadeev |b Y. H. | |
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| 701 | 1 | |a Denisov |b V. V. | |
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