The influence of some model parameters on the impurity distribution implanted into substrate surface; IOP Conference Series: Materials Science and Engineering; Vol. 124 : Mechanical Engineering, Automation and Control Systems (MEACS2015)

The influence of some model parameters on the impurity distribution implanted into substrate surface; IOP Conference Series: Materials Science and Engineering; Vol. 124 : Mechanical Engineering, Automation and Control Systems (MEACS2015)

Dades bibliogràfiques
Parent link:	IOP Conference Series: Materials Science and Engineering Vol. 124 : Mechanical Engineering, Automation and Control Systems (MEACS2015).— 2016.— [012085, 4 p.]
Autor principal:	Parfenova E. S. Elena Sergeevna
Autor corporatiu:	Национальный исследовательский Томский политехнический университет (ТПУ) Институт физики высоких технологий (ИФВТ) Кафедра физики высоких технологий в машиностроении (ФВТМ)
Altres autors:	Knyazeva A. G. Anna Georgievna
Sumari:	Title screen The model for description of the initial stage of ion implantation into the surface layer of the metal is presented. The interdependence of embedded impurity concentration and deformations arising from the impact of particles on the surface is investigated. The model takes into account the particle diffusion, the finite time of mass flux relaxation; the stress appearance due to a composition change of the surface layer and a mass transfer phenomenon under a stress gradient action. It is established that the interaction of mechanical waves and concentration leads to a distribution of concentration not corresponding to a pure diffusion process. The examples of coupled problems solution for different sets of model parameters are presented.
Idioma:	anglès
Publicat:	2016
Col·lecció:	Numerical Simulation of Applied Problems
Matèries:	электронный ресурс труды учёных ТПУ примеси поверхности подложки ионная имплантация металлы тепловые потоки массообмен диффузия
Accés en línia:	http://dx.doi.org/10.1088/1757-899X/124/1/012085 http://earchive.tpu.ru/handle/11683/33861
Format:	Electrònic Capítol de llibre
KOHA link:	https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=648554

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