The influence of some model parameters on the impurity distribution implanted into substrate surface
| Parent link: | IOP Conference Series: Materials Science and Engineering Vol. 124 : Mechanical Engineering, Automation and Control Systems (MEACS2015).— 2016.— [012085, 4 p.] |
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| প্রধান লেখক: | |
| সংস্থা লেখক: | |
| অন্যান্য লেখক: | |
| সংক্ষিপ্ত: | Title screen The model for description of the initial stage of ion implantation into the surface layer of the metal is presented. The interdependence of embedded impurity concentration and deformations arising from the impact of particles on the surface is investigated. The model takes into account the particle diffusion, the finite time of mass flux relaxation; the stress appearance due to a composition change of the surface layer and a mass transfer phenomenon under a stress gradient action. It is established that the interaction of mechanical waves and concentration leads to a distribution of concentration not corresponding to a pure diffusion process. The examples of coupled problems solution for different sets of model parameters are presented. |
| প্রকাশিত: |
2016
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| মালা: | Numerical Simulation of Applied Problems |
| বিষয়গুলি: | |
| অনলাইন ব্যবহার করুন: | http://dx.doi.org/10.1088/1757-899X/124/1/012085 http://earchive.tpu.ru/handle/11683/33861 |
| বিন্যাস: | বৈদ্যুতিক গ্রন্থের অধ্যায় |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=648554 |
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| 200 | 1 | |a The influence of some model parameters on the impurity distribution implanted into substrate surface |f E. S. Parfenova, A. G. Knyazeva | |
| 203 | |a Text |c electronic | ||
| 225 | 1 | |a Numerical Simulation of Applied Problems | |
| 300 | |a Title screen | ||
| 320 | |a [References: 7 tit.] | ||
| 330 | |a The model for description of the initial stage of ion implantation into the surface layer of the metal is presented. The interdependence of embedded impurity concentration and deformations arising from the impact of particles on the surface is investigated. The model takes into account the particle diffusion, the finite time of mass flux relaxation; the stress appearance due to a composition change of the surface layer and a mass transfer phenomenon under a stress gradient action. It is established that the interaction of mechanical waves and concentration leads to a distribution of concentration not corresponding to a pure diffusion process. The examples of coupled problems solution for different sets of model parameters are presented. | ||
| 461 | 0 | |0 (RuTPU)RU\TPU\network\2008 |t IOP Conference Series: Materials Science and Engineering | |
| 463 | 0 | |0 (RuTPU)RU\TPU\network\13617 |t Vol. 124 : Mechanical Engineering, Automation and Control Systems (MEACS2015) |o International Conference, 1–4 December 2015, Tomsk, Russia |o [proceedings] |v [012085, 4 p.] |d 2016 | |
| 610 | 1 | |a электронный ресурс | |
| 610 | 1 | |a труды учёных ТПУ | |
| 610 | 1 | |a примеси | |
| 610 | 1 | |a поверхности | |
| 610 | 1 | |a подложки | |
| 610 | 1 | |a ионная имплантация | |
| 610 | 1 | |a металлы | |
| 610 | 1 | |a тепловые потоки | |
| 610 | 1 | |a массообмен | |
| 610 | 1 | |a диффузия | |
| 700 | 1 | |a Parfenova |b E. S. |c Chemical Engineer |c engineer of Tomsk Polytechnic University |f 1989- |g Elena Sergeevna |3 (RuTPU)RU\TPU\pers\34500 | |
| 701 | 1 | |a Knyazeva |b A. G. |c Russian physicist |c Professor of Tomsk Polytechnic University, doctor of physico-mathematical Sciences |f 1962- |g Anna Georgievna |3 (RuTPU)RU\TPU\pers\32712 |9 16597 | |
| 712 | 0 | 2 | |a Национальный исследовательский Томский политехнический университет (ТПУ) |b Институт физики высоких технологий (ИФВТ) |b Кафедра физики высоких технологий в машиностроении (ФВТМ) |3 (RuTPU)RU\TPU\col\18687 |
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| 856 | 4 | |u http://dx.doi.org/10.1088/1757-899X/124/1/012085 | |
| 856 | 4 | |u http://earchive.tpu.ru/handle/11683/33861 | |
| 942 | |c CF | ||