APA (7th ed.) Citation

Parfenova E. S. Elena Sergeevna & Knyazeva A. G. Anna Georgievna. (2016). The influence of some model parameters on the impurity distribution implanted into substrate surface; IOP Conference Series: Materials Science and Engineering; Vol. 124 : Mechanical Engineering, Automation and Control Systems (MEACS2015). 2016. https://doi.org/10.1088/1757-899X/124/1/012085

Chicago Style (17th ed.) Citation

Parfenova E. S. Elena Sergeevna and Knyazeva A. G. Anna Georgievna. The Influence of Some Model Parameters on the Impurity Distribution Implanted into Substrate Surface; IOP Conference Series: Materials Science and Engineering; Vol. 124 : Mechanical Engineering, Automation and Control Systems (MEACS2015). 2016, 2016. https://doi.org/10.1088/1757-899X/124/1/012085.

MLA (9th ed.) Citation

Parfenova E. S. Elena Sergeevna and Knyazeva A. G. Anna Georgievna. The Influence of Some Model Parameters on the Impurity Distribution Implanted into Substrate Surface; IOP Conference Series: Materials Science and Engineering; Vol. 124 : Mechanical Engineering, Automation and Control Systems (MEACS2015). 2016, 2016. https://doi.org/10.1088/1757-899X/124/1/012085.