Deposition of Polycrystalline Diamond Films with a Controlled Grain Size by Periodic Secondary Nucleation; Materials Today: Proceedings; Vol. 3, supl. 2 : Diamond and Carbon Materials - DCM 2014

Библиографические подробности
Источник:Materials Today: Proceedings: Scientific Journal
Vol. 3, supl. 2 : Diamond and Carbon Materials - DCM 2014.— 2016.— [P. 138–144]
Главный автор: Linnik S. A. Stepan Andreevich
Автор-организация: Национальный исследовательский Томский политехнический университет (ТПУ) Институт физики высоких технологий (ИФВТ) Лаборатория № 1
Другие авторы: Gaydaychuk A. V. Alexander Valerievich, Baryshnikov E. Yu. Evgeny Yurjevich
Примечания:Title screen
This paper presents a new method for the synthesis of polycrystalline diamond films with a controlled grain size, based on theprinciple of creating a multilayer coating structure by periodic bias-induced secondary nucleation. By this technique, wesynthesized diamond films with a thickness of up to 120 µm and a grain size of up to 1 µm. The diamond multilayer filmsobtained were characterized by scanning electron microscopy (SEM), Raman spectroscopy, and X-ray diffraction (XRD). Theeffect of different deposition parameters on nucleation density was also discussed. This method shows considerable promise forthe synthesis of thick diamond coatings with low roughness and internal stress.
Режим доступа: по договору с организацией-держателем ресурса
Язык:английский
Опубликовано: 2016
Предметы:
Online-ссылка:http://dx.doi.org/10.1016/j.matpr.2016.02.024
Формат: Электронный ресурс Статья
Запись в KOHA:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=648523

MARC

LEADER 00000naa0a2200000 4500
001 648523
005 20250905160123.0
035 |a (RuTPU)RU\TPU\network\13682 
090 |a 648523 
100 |a 20160523d2016 k||y0engy50 ba 
101 0 |a eng 
135 |a drcn ---uucaa 
181 0 |a i  
182 0 |a b 
200 1 |a Deposition of Polycrystalline Diamond Films with a Controlled Grain Size by Periodic Secondary Nucleation  |f S. A. Linnik, A. V. Gaydaychuk, E. Yu. Baryshnikov 
203 |a Text  |c electronic 
300 |a Title screen 
320 |a [References: p. 144 (15 tit.)] 
330 |a This paper presents a new method for the synthesis of polycrystalline diamond films with a controlled grain size, based on theprinciple of creating a multilayer coating structure by periodic bias-induced secondary nucleation. By this technique, wesynthesized diamond films with a thickness of up to 120 µm and a grain size of up to 1 µm. The diamond multilayer filmsobtained were characterized by scanning electron microscopy (SEM), Raman spectroscopy, and X-ray diffraction (XRD). Theeffect of different deposition parameters on nucleation density was also discussed. This method shows considerable promise forthe synthesis of thick diamond coatings with low roughness and internal stress. 
333 |a Режим доступа: по договору с организацией-держателем ресурса 
461 |t Materials Today: Proceedings  |o Scientific Journal 
463 |t Vol. 3, supl. 2 : Diamond and Carbon Materials - DCM 2014  |v [P. 138–144]  |o 25th International Conference, Spanish, Madrid, September 7-11, 2014  |d 2016 
610 1 |a электронный ресурс 
610 1 |a труды учёных ТПУ 
610 1 |a алмазные пленки 
610 1 |a ионная бомбардировка 
610 1 |a многослойные структуры 
700 1 |a Linnik  |b S. A.  |c physicist  |c Engineer-Researcher of Tomsk Polytechnic University  |f 1985-  |g Stepan Andreevich  |3 (RuTPU)RU\TPU\pers\32877  |9 16725 
701 1 |a Gaydaychuk  |b A. V.  |c physicist  |c Postgraduate, Engineer - Researcher of Tomsk Polytechnic University  |f 1984-  |g Alexander Valerievich  |3 (RuTPU)RU\TPU\pers\32876  |9 16724 
701 1 |a Baryshnikov  |b E. Yu.  |g Evgeny Yurjevich 
712 0 2 |a Национальный исследовательский Томский политехнический университет (ТПУ)  |b Институт физики высоких технологий (ИФВТ)  |b Лаборатория № 1  |3 (RuTPU)RU\TPU\col\19035 
801 2 |a RU  |b 63413507  |c 20160523  |g RCR 
856 4 |u http://dx.doi.org/10.1016/j.matpr.2016.02.024 
942 |c CF