Deposition of Polycrystalline Diamond Films with a Controlled Grain Size by Periodic Secondary Nucleation

Detalhes bibliográficos
Parent link:Materials Today: Proceedings: Scientific Journal
Vol. 3, supl. 2 : Diamond and Carbon Materials - DCM 2014.— 2016.— [P. 138–144]
Autor principal: Linnik S. A. Stepan Andreevich
Autor Corporativo: Национальный исследовательский Томский политехнический университет (ТПУ) Институт физики высоких технологий (ИФВТ) Лаборатория № 1
Outros Autores: Gaydaychuk A. V. Alexander Valerievich, Baryshnikov E. Yu. Evgeny Yurjevich
Resumo:Title screen
This paper presents a new method for the synthesis of polycrystalline diamond films with a controlled grain size, based on theprinciple of creating a multilayer coating structure by periodic bias-induced secondary nucleation. By this technique, wesynthesized diamond films with a thickness of up to 120 µm and a grain size of up to 1 µm. The diamond multilayer filmsobtained were characterized by scanning electron microscopy (SEM), Raman spectroscopy, and X-ray diffraction (XRD). Theeffect of different deposition parameters on nucleation density was also discussed. This method shows considerable promise forthe synthesis of thick diamond coatings with low roughness and internal stress.
Режим доступа: по договору с организацией-держателем ресурса
Publicado em: 2016
Assuntos:
Acesso em linha:http://dx.doi.org/10.1016/j.matpr.2016.02.024
Formato: Recurso Electrónico Capítulo de Livro
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=648523
Descrição
Resumo:Title screen
This paper presents a new method for the synthesis of polycrystalline diamond films with a controlled grain size, based on theprinciple of creating a multilayer coating structure by periodic bias-induced secondary nucleation. By this technique, wesynthesized diamond films with a thickness of up to 120 µm and a grain size of up to 1 µm. The diamond multilayer filmsobtained were characterized by scanning electron microscopy (SEM), Raman spectroscopy, and X-ray diffraction (XRD). Theeffect of different deposition parameters on nucleation density was also discussed. This method shows considerable promise forthe synthesis of thick diamond coatings with low roughness and internal stress.
Режим доступа: по договору с организацией-держателем ресурса
DOI:10.1016/j.matpr.2016.02.024