Synthesis, structure and characteristics of al-si-n coatings prepared by vacuum arc plasma-assisted method

Synthesis, structure and characteristics of al-si-n coatings prepared by vacuum arc plasma-assisted method

Bibliographic Details
Parent link:	Известия вузов. Физика: научный журнал/ Национальный исследовательский Томский государственный университет (ТГУ).— , 1957- Т. 55, № 12-2.— 2012.— [С. 162-165]
Corporate Author:	Национальный исследовательский Томский политехнический университет (ТПУ)
Other Authors:	Koval N. N. Nikolay Nikolaevich, Ivanov Yu. F. Yuriy Fedorovich, Krysina O. V., Shugurov V. V.
Summary:	Заглавие с экрана The experiments on synthesis of Al-Si-N coatings by vacuum-arc plasma-assisted deposition were carried out at a variation of bias voltage parameters. Optimum modes of deposition of these type coatings were revealed. It is shown that the coatings is multiphase, possesses nanocrystalline structure with the average crystallite size of d = (20.9 ± 7.3) nm. Режим доступа: по договору с организацией-держателем ресурса
Published:	2012
Subjects:	электронный ресурс труды учёных ТПУ нанокристаллическая структура прочность
Online Access:	http://elibrary.ru/item.asp?id=20133334
Format:	Electronic Book Chapter
KOHA link:	https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=648169

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