Synthesis, structure and characteristics of al-si-n coatings prepared by vacuum arc plasma-assisted method; Известия вузов. Физика; Т. 55, № 12-2

Synthesis, structure and characteristics of al-si-n coatings prepared by vacuum arc plasma-assisted method; Известия вузов. Физика; Т. 55, № 12-2

Detalles Bibliográficos
Parent link:	Известия вузов. Физика: научный журнал/ Национальный исследовательский Томский государственный университет (ТГУ).— , 1957- Т. 55, № 12-2.— 2012.— [С. 162-165]
Autor Corporativo:	Национальный исследовательский Томский политехнический университет (ТПУ)
Outros autores:	Koval N. N. Nikolay Nikolaevich, Ivanov Yu. F. Yuriy Fedorovich, Krysina O. V., Shugurov V. V.
Summary:	Заглавие с экрана The experiments on synthesis of Al-Si-N coatings by vacuum-arc plasma-assisted deposition were carried out at a variation of bias voltage parameters. Optimum modes of deposition of these type coatings were revealed. It is shown that the coatings is multiphase, possesses nanocrystalline structure with the average crystallite size of d = (20.9 ± 7.3) nm. Режим доступа: по договору с организацией-держателем ресурса
Idioma:	ruso
Publicado:	2012
Subjects:	электронный ресурс труды учёных ТПУ нанокристаллическая структура прочность
Acceso en liña:	http://elibrary.ru/item.asp?id=20133334
Formato:	Electrónico Capítulo de libro
KOHA link:	https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=648169

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