Synthesis, structure and characteristics of al-si-n coatings prepared by vacuum arc plasma-assisted method; Известия вузов. Физика; Т. 55, № 12-2
| Parent link: | Известия вузов. Физика: научный журнал/ Национальный исследовательский Томский государственный университет (ТГУ).— , 1957- Т. 55, № 12-2.— 2012.— [С. 162-165] |
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| 企业作者: | |
| 其他作者: | , , , |
| 总结: | Заглавие с экрана The experiments on synthesis of Al-Si-N coatings by vacuum-arc plasma-assisted deposition were carried out at a variation of bias voltage parameters. Optimum modes of deposition of these type coatings were revealed. It is shown that the coatings is multiphase, possesses nanocrystalline structure with the average crystallite size of d = (20.9 ± 7.3) nm. Режим доступа: по договору с организацией-держателем ресурса |
| 语言: | 俄语 |
| 出版: |
2012
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| 主题: | |
| 在线阅读: | http://elibrary.ru/item.asp?id=20133334 |
| 格式: | 电子 本书章节 |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=648169 |