Synthesis, structure and characteristics of al-si-n coatings prepared by vacuum arc plasma-assisted method; Известия вузов. Физика; Т. 55, № 12-2
| Parent link: | Известия вузов. Физика: научный журнал/ Национальный исследовательский Томский государственный университет (ТГУ).— , 1957- Т. 55, № 12-2.— 2012.— [С. 162-165] |
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| Erakunde egilea: | |
| Beste egile batzuk: | , , , |
| Gaia: | Заглавие с экрана The experiments on synthesis of Al-Si-N coatings by vacuum-arc plasma-assisted deposition were carried out at a variation of bias voltage parameters. Optimum modes of deposition of these type coatings were revealed. It is shown that the coatings is multiphase, possesses nanocrystalline structure with the average crystallite size of d = (20.9 ± 7.3) nm. Режим доступа: по договору с организацией-держателем ресурса |
| Hizkuntza: | errusiera |
| Argitaratua: |
2012
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| Gaiak: | |
| Sarrera elektronikoa: | http://elibrary.ru/item.asp?id=20133334 |
| Formatua: | Baliabide elektronikoa Liburu kapitulua |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=648169 |
MARC
| LEADER | 00000naa0a2200000 4500 | ||
|---|---|---|---|
| 001 | 648169 | ||
| 005 | 20250219150236.0 | ||
| 035 | |a (RuTPU)RU\TPU\network\13326 | ||
| 035 | |a RU\TPU\network\13318 | ||
| 090 | |a 648169 | ||
| 100 | |a 20160512d2012 k||y0rusy50 ca | ||
| 101 | 0 | |a rus | |
| 102 | |a RU | ||
| 135 | |a drcn ---uucaa | ||
| 181 | 0 | |a i | |
| 182 | 0 | |a b | |
| 200 | 1 | |a Synthesis, structure and characteristics of al-si-n coatings prepared by vacuum arc plasma-assisted method |f N. N. Koval [et al.] | |
| 203 | |a Текст |c электронный | ||
| 300 | |a Заглавие с экрана | ||
| 320 | |a [Библиогр.: 7 назв.] | ||
| 330 | |a The experiments on synthesis of Al-Si-N coatings by vacuum-arc plasma-assisted deposition were carried out at a variation of bias voltage parameters. Optimum modes of deposition of these type coatings were revealed. It is shown that the coatings is multiphase, possesses nanocrystalline structure with the average crystallite size of d = (20.9 ± 7.3) nm. | ||
| 333 | |a Режим доступа: по договору с организацией-держателем ресурса | ||
| 461 | |t Известия вузов. Физика |o научный журнал |f Национальный исследовательский Томский государственный университет (ТГУ) |d 1957- | ||
| 463 | |t Т. 55, № 12-2 |v [С. 162-165] |d 2012 | ||
| 610 | 1 | |a электронный ресурс | |
| 610 | 1 | |a труды учёных ТПУ | |
| 610 | 1 | |a нанокристаллическая структура | |
| 610 | 1 | |a прочность | |
| 701 | 1 | |a Koval |b N. N. |c specialist in the field of electronics |c Professor of Tomsk Polytechnic University, Doctor of technical sciences |f 1948- |g Nikolay Nikolaevich |3 (RuTPU)RU\TPU\pers\34748 |9 18098 | |
| 701 | 1 | |a Ivanov |b Yu. F. |c physicist |c Professor of Tomsk Polytechnic University, Doctor of physical and mathematical sciences |f 1955- |g Yuriy Fedorovich |3 (RuTPU)RU\TPU\pers\33559 |9 17226 | |
| 701 | 1 | |a Krysina |b O. V. | |
| 701 | 1 | |a Shugurov |b V. V. | |
| 712 | 0 | 2 | |a Национальный исследовательский Томский политехнический университет (ТПУ) |c (2009- ) |3 (RuTPU)RU\TPU\col\15902 |
| 801 | 2 | |a RU |b 63413507 |c 20161017 |g RCR | |
| 856 | 4 | |u http://elibrary.ru/item.asp?id=20133334 | |
| 942 | |c CF | ||