Automated vacuum ion-plasma installation; Известия вузов. Физика; Vol. 55, № 12-3

Automated vacuum ion-plasma installation; Известия вузов. Физика; Vol. 55, № 12-3

Bibliographic Details
Parent link:	Известия вузов. Физика: научный журнал/ Национальный исследовательский Томский государственный университет.— , 1957- Vol. 55, № 12-3.— 2012.— [P. 118-122]
Corporate Author:	Национальный исследовательский Томский политехнический университет (ТПУ)
Other Authors:	Kalushevich A. A., Koval N. N. Nikolay Nikolaevich, Denisov V. V., Yakovlev V. V., Shugurov V. V.
Summary:	Title screen Principles of operation, design and basic parameters of the automated vacuum ion-plasma installation intended for the arc nitriding and plasma-assisted deposition of nano structured coatings were considered. Application of the installation includes scientific research in the field of formation of the strengthening and protective coatings on the instrument, friction vapors with use of multicomponent composite cathodes. The installation is completely automated for the purpose of accurate reproducibility of complex technological processes. The control program includes the process chart to realize hundreds of different iterations in a unified technological cycle. Режим доступа: по договору с организацией-держателем ресурса
Language:	English
Published:	2012
Subjects:	электронный ресурс труды учёных ТПУ вакуумная установка плазма
Online Access:	http://elibrary.ru/item.asp?id=20710402
Format:	Electronic Book Chapter
KOHA link:	https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=647951

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