Influence of the substrate bias on the stoichiometry and structure of RF-magnetron sputter-deposited silver-containing calcium phosphate coatings; Materialwissenschaft und Werkstofftechnik; Vol. 44, iss. 2-3
| Parent link: | Materialwissenschaft und Werkstofftechnik.— , 1988- Vol. 44, iss. 2-3.— 2013.— [P. 218-225] |
|---|---|
| Korporativní autor: | Национальный исследовательский Томский политехнический университет Физико-технический институт Кафедра теоретической и экспериментальной физики Центр технологий |
| Další autoři: | Ivanova A. A. Anna Aleksandrovna, Surmeneva M. A. Maria Alexandrovna, Grubova I. Yu. Irina Yurievna, Sharonova A. A. Anna Aleksandrovna, Pichugin V. F. Vladimir Fyodorovich, Chaikina M. V., Buck V., Prymak O., Epple M., Surmenev R. A. Roman Anatolievich |
| Shrnutí: | Title screen A coating on the basis of silver-containing hydroxyapatite (silver-hydroxyapatite) was deposited by radio frequency (RF) magnetron sputtering. X-ray diffractometry, scanning electron microscopy, energy-dispersive X-ray spectroscopy, and ellipsometry were used to analyse the change in structure and stoichiometry of the coatings upon the change of the negative electrical bias (-50 V and -100 V) on the substrate. The chemical composition of the sputter-deposited coating was identical to the target. However, an increase in the negative electrical bias on the substrate led to a decrease of the coating thickness. In addition, the average size of the grains decreased from 55 ± 15 nm (grounded substrate) up to 30 ± 10 nm when an electrical bias of -100 V was applied. Silber-dotierte Hydroxylapatit-Beschichtungen wurden durch RF-Magnetron Spritzen hergestellt. Die Abhängigkeit der Schichteigenschaften (Struktur, Stöchiometrie) von der elektrischen Vorspannung (-50 V und -100 V) wurde durch Röntgenbeugung, Rasterelektronenmikroskopie, energiedispersive Röntgenspektroskopie und Ellipsometrie untersucht. Die chemische Zusammensetzung der Beschichtungen war identisch mit der Zusammensetzung des Targets. Eine Erhöhung der elektrisch negativen DC-Vorspannung auf dem Substrat führte zu einer Abnahme der Schichtdicke. Die mittlere Korngröße betrug 55 ± 15 nm bei einem geerdeten Substrat und 30 ± 10 nm bei einer elektrischen Vorspannung von -100 V. |
| Jazyk: | angličtina |
| Vydáno: |
2013
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| Témata: | |
| On-line přístup: | http://dx.doi.org/10.1002/mawe.201300101 |
| Médium: | Elektronický zdroj Kapitola |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=647505 |
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