Multilayer Coating Formation at the Deposition from Plasma
| Parent link: | IOP Conference Series: Materials Science and Engineering Vol. 116 : Advanced Materials and New Technologies in Modern Materials Science.— 2016.— [012003, 5 p.] |
|---|---|
| Huvudupphovsman: | Shanin S. A. Sergei Aleksandrovich |
| Institutionell upphovsman: | Национальный исследовательский Томский политехнический университет (ТПУ) Институт физики высоких технологий (ИФВТ) Кафедра физики высоких технологий в машиностроении (ФВТМ) |
| Övriga upphovsmän: | Knyazeva A. G. Anna Georgievna |
| Sammanfattning: | Title screen The numerical experiment was carried out for the process of the coating composition formation during deposition from plasma. The chemical reactions between elements are taken into account. The nonuniform composition of the coating is determined by various transfer processes, including diffusion under stress action. To find the stress field the equilibrium problem was solved numerically because all physical and mechanical properties depend on composition. Stress field has been also obtained nonuniform. Режим доступа: по договору с организацией-держателем ресурса |
| Språk: | engelska |
| Publicerad: |
2016
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| Ämnen: | |
| Länkar: | http://dx.doi.org/10.1088/1757-899X/116/1/012003 http://earchive.tpu.ru/handle/11683/18935 |
| Materialtyp: | Elektronisk Bokavsnitt |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=647094 |
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