Structure and Properties of Ti–O–N Coatings Produced by Reactive Magnetron Sputtering

Structure and Properties of Ti–O–N Coatings Produced by Reactive Magnetron Sputtering

Bibliographic Details
Parent link:Russian Physics Journal: Scientific Journal
Vol. 56, iss. 10.— 2014.— [P. 1144-1149]
Corporate Author: Национальный исследовательский Томский политехнический университет Физико-технический институт Кафедра теоретической и экспериментальной физики
Other Authors: Konishchev M. E. Maksim Evgenievich, Kuzmin O. S. Oleg Stanislavovich, Pustovalova A. A. Alla Aleksandrovna, Морозова Н. С. Наталья Сергеевна, Evdokimov K. E. Kirill Evgenievich, Surmenev R. A. Roman Anatolievich, Pichugin V. F. Vladimir Fyodorovich, Epple M. K. Mattias Kristian
Summary:Title screen
Results of an experimental study of the optical characteristics of gas discharges are presented. The study was aimed at optimizing the operating modes of a mid-frequency magnetron sputtering system to efficiently deposit Ti–O–N coatings. The conditions for maintaining the intensity of the chosen spectroscopic lines that ensure synthesis of titanium oxide and titanium oxynitride coatings have been revealed. The morphology, structure, contact angle, and free surface energy of titanium oxide and titanium oxynitride coatings on type 12Kh18N10T stainless steel substrates were examined by using scanning and transmission electron microscopy and infrared spectroscopy, and by measuring the wetting angle. The results of examination of the structure and properties of the synthesized films and their physicomechanical and optical characteristics are given.
Режим доступа: по договору с организацией-держателем ресурса
Language:English
Published: 2014
Subjects:
электронный ресурс
труды учёных ТПУ
Online Access:http://dx.doi.org/10.1007/s11182-014-0154-5
Format: Electronic Book Chapter
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=647075

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