Structure and Properties of Ti–O–N Coatings Produced by Reactive Magnetron Sputtering; Russian Physics Journal; Vol. 56, iss. 10
| Parent link: | Russian Physics Journal: Scientific Journal Vol. 56, iss. 10.— 2014.— [P. 1144-1149] |
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| Autor Corporativo: | |
| Otros Autores: | , , , , , , , |
| Sumario: | Title screen Results of an experimental study of the optical characteristics of gas discharges are presented. The study was aimed at optimizing the operating modes of a mid-frequency magnetron sputtering system to efficiently deposit Ti–O–N coatings. The conditions for maintaining the intensity of the chosen spectroscopic lines that ensure synthesis of titanium oxide and titanium oxynitride coatings have been revealed. The morphology, structure, contact angle, and free surface energy of titanium oxide and titanium oxynitride coatings on type 12Kh18N10T stainless steel substrates were examined by using scanning and transmission electron microscopy and infrared spectroscopy, and by measuring the wetting angle. The results of examination of the structure and properties of the synthesized films and their physicomechanical and optical characteristics are given. Режим доступа: по договору с организацией-держателем ресурса |
| Lenguaje: | inglés |
| Publicado: |
2014
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| Materias: | |
| Acceso en línea: | http://dx.doi.org/10.1007/s11182-014-0154-5 |
| Formato: | Electrónico Capítulo de libro |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=647075 |
MARC
| LEADER | 00000naa0a2200000 4500 | ||
|---|---|---|---|
| 001 | 647075 | ||
| 005 | 20250204120500.0 | ||
| 035 | |a (RuTPU)RU\TPU\network\12212 | ||
| 090 | |a 647075 | ||
| 100 | |a 20160324d2014 k||y0rusy50 ba | ||
| 101 | 0 | |a eng | |
| 135 | |a drcn ---uucaa | ||
| 181 | 0 | |a i | |
| 182 | 0 | |a b | |
| 200 | 1 | |a Structure and Properties of Ti–O–N Coatings Produced by Reactive Magnetron Sputtering |d Структура и свойства покрытий на основе Ti-O-N, сформированных методом реактивного магнетронного распыления |f M. E. Konishchev [et al.] | |
| 203 | |a Text |c electronic | ||
| 300 | |a Title screen | ||
| 320 | |a [References: 18 tit.] | ||
| 330 | |a Results of an experimental study of the optical characteristics of gas discharges are presented. The study was aimed at optimizing the operating modes of a mid-frequency magnetron sputtering system to efficiently deposit Ti–O–N coatings. The conditions for maintaining the intensity of the chosen spectroscopic lines that ensure synthesis of titanium oxide and titanium oxynitride coatings have been revealed. The morphology, structure, contact angle, and free surface energy of titanium oxide and titanium oxynitride coatings on type 12Kh18N10T stainless steel substrates were examined by using scanning and transmission electron microscopy and infrared spectroscopy, and by measuring the wetting angle. The results of examination of the structure and properties of the synthesized films and their physicomechanical and optical characteristics are given. | ||
| 333 | |a Режим доступа: по договору с организацией-держателем ресурса | ||
| 461 | |t Russian Physics Journal |o Scientific Journal | ||
| 463 | |t Vol. 56, iss. 10 |v [P. 1144-1149] |d 2014 | ||
| 510 | 1 | |a Структура и свойства покрытий на основе Ti-O-N, сформированных методом реактивного магнетронного распыления |z rus | |
| 610 | 1 | |a электронный ресурс | |
| 610 | 1 | |a труды учёных ТПУ | |
| 701 | 1 | |a Konishchev |b M. E. |c physicist |c Senior Lecturer of Tomsk Polytechnic University |f 1987- |g Maksim Evgenievich |3 (RuTPU)RU\TPU\pers\34212 |9 17743 | |
| 701 | 1 | |a Kuzmin |b O. S. |c physicist |c engineer of Tomsk Polytechnic University |f 1961- |g Oleg Stanislavovich |3 (RuTPU)RU\TPU\pers\33973 |9 17546 | |
| 701 | 1 | |a Pustovalova |b A. A. |c biophysicist |c engineer of Tomsk Polytechnic University |f 1989- |g Alla Aleksandrovna |3 (RuTPU)RU\TPU\pers\34214 |9 17745 | |
| 701 | 1 | |a Морозова |b Н. С. |c специалист в области материаловедения |c инженер-проектировщик Томского политехнического университета |f 1988- |g Наталья Сергеевна |3 (RuTPU)RU\TPU\pers\28689 |9 13499 | |
| 701 | 1 | |a Evdokimov |b K. E. |c physicist |c Associate Professor of Tomsk Polytechnic University, Candidate of physical and mathematical sciences |f 1976- |g Kirill Evgenievich |3 (RuTPU)RU\TPU\pers\31791 |9 15902 | |
| 701 | 1 | |a Surmenev |b R. A. |c physicist |c Associate Professor of Tomsk Polytechnic University, Senior researcher, Candidate of physical and mathematical sciences |f 1982- |g Roman Anatolievich |3 (RuTPU)RU\TPU\pers\31885 |9 15957 | |
| 701 | 1 | |a Pichugin |b V. F. |c Professor of Tomsk Polytechnic University, Doctor of physical and mathematical sciences |c Physicist |f 1944-2021 |g Vladimir Fyodorovich |3 (RuTPU)RU\TPU\pers\30933 |9 15171 | |
| 701 | 1 | |a Epple |b M. K. |g Mattias Kristian | |
| 712 | 0 | 2 | |a Национальный исследовательский Томский политехнический университет |b Физико-технический институт |b Кафедра теоретической и экспериментальной физики |3 (RuTPU)RU\TPU\col\18726 |9 27175 |
| 801 | 2 | |a RU |b 63413507 |c 20160324 |g RCR | |
| 856 | 4 | |u http://dx.doi.org/10.1007/s11182-014-0154-5 | |
| 942 | |c CF | ||