Yuriev Yu. N. Yuri Nikolaevich, Sidelev D. V. Dmitry Vladimirovich, & Kiseleva D. V. Darjya Vasiljevna. (2015). Deposition of barrier layers of titanium nitride using dual magnetron. 2015.
Chicago Style (17th ed.) CitationYuriev Yu. N. Yuri Nikolaevich, Sidelev D. V. Dmitry Vladimirovich, and Kiseleva D. V. Darjya Vasiljevna. Deposition of Barrier Layers of Titanium Nitride Using Dual Magnetron. 2015, 2015.
MLA (9th ed.) CitationYuriev Yu. N. Yuri Nikolaevich, et al. Deposition of Barrier Layers of Titanium Nitride Using Dual Magnetron. 2015, 2015.
Warning: These citations may not always be 100% accurate.