APA (7th ed.) Citation

Yuriev Yu. N. Yuri Nikolaevich, Sidelev D. V. Dmitry Vladimirovich, & Kiseleva D. V. Darjya Vasiljevna. (2015). Deposition of barrier layers of titanium nitride using dual magnetron; Известия вузов. Физика; V. 58, № 9-3. 2015.

Chicago Style (17th ed.) Citation

Yuriev Yu. N. Yuri Nikolaevich, Sidelev D. V. Dmitry Vladimirovich, and Kiseleva D. V. Darjya Vasiljevna. Deposition of Barrier Layers of Titanium Nitride Using Dual Magnetron; Известия вузов. Физика; V. 58, № 9-3. 2015, 2015.

MLA (9th ed.) Citation

Yuriev Yu. N. Yuri Nikolaevich, et al. Deposition of Barrier Layers of Titanium Nitride Using Dual Magnetron; Известия вузов. Физика; V. 58, № 9-3. 2015, 2015.