Coating Composition Evolution during the Deposition of Al and N from Plasma on a Cylindrical Substrate

Bibliographic Details
Parent link:Key Engineering Materials: Scientific Journal
Vol. 685 : High Technology: Research and Applications 2015 (HTRA 2015).— 2016.— [P. 690-694]
Main Author: Shanin S. A. Sergei Aleksandrovich
Corporate Author: Национальный исследовательский Томский политехнический университет (ТПУ) Институт физики высоких технологий (ИФВТ) Кафедра физики высоких технологий в машиностроении (ФВТМ)
Other Authors: Knyazeva A. G. Anna Georgievna, Kryukova O. N. Olga Nikolaevna
Summary:Title screen
This paper presents the results of the numerical study of the coating composition evolution deposited on a cylindrical specimen from plasma containing aluminum and nitrogen. Calculations were based on a coupling model, which accounted for various transfer mechanisms and staged chemical reactions in the coating and in the transient zone. The evolution of the coating composition is connected with transfer processes, chemical reactions, and with the change of effective properties.
Режим доступа: по договору с организацией-держателем ресурса
Language:English
Published: 2016
Series:Discharge and Plasma-Beam Technology
Subjects:
Online Access:http://dx.doi.org/10.4028/www.scientific.net/KEM.685.690
Format: Electronic Book Chapter
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=646516
Description
Summary:Title screen
This paper presents the results of the numerical study of the coating composition evolution deposited on a cylindrical specimen from plasma containing aluminum and nitrogen. Calculations were based on a coupling model, which accounted for various transfer mechanisms and staged chemical reactions in the coating and in the transient zone. The evolution of the coating composition is connected with transfer processes, chemical reactions, and with the change of effective properties.
Режим доступа: по договору с организацией-держателем ресурса
DOI:10.4028/www.scientific.net/KEM.685.690