The Deposition of Silicon-Carbon Coatings in Plasma Based Nonself-Sustained Arc Discharge with Heated Cathode; Key Engineering Materials; Vol. 685 : High Technology: Research and Applications 2015 (HTRA 2015)

The Deposition of Silicon-Carbon Coatings in Plasma Based Nonself-Sustained Arc Discharge with Heated Cathode; Key Engineering Materials; Vol. 685 : High Technology: Research and Applications 2015 (HTRA 2015)

Bibliographic Details
Parent link:	Key Engineering Materials: Scientific Journal Vol. 685 : High Technology: Research and Applications 2015 (HTRA 2015).— 2016.— [P. 643-647]
Corporate Author:	Национальный исследовательский Томский политехнический университет (ТПУ) Физико-технический институт (ФТИ) Кафедра теоретической и экспериментальной физики (ТиЭФ)
Other Authors:	Grenadyorov A. S., Oskomov K. V., Soloviev A. A. Andrey Aleksandrovich, Rabotkin S. V., Kovsharov N. F.
Summary:	Title screen Silicon-carbon coatings on silicon substrates were deposited in plasma based nonself-sustained arc discharge with heated cathode by plasma polymerization of silicon organic agent such as polyphenyl methylsiloxane (PPhMS). Silicon-carbon coatings were deposited at PPhMS flow rate of 0.012 ml/min, argon pressure of 0-0.1 Pa, discharge current of 5-8 A, discharge voltage of 130-150 V, and filament current of 68 A. Bipolar pulsed bias voltage was supplied on the substrate during coating deposition. Surface morphology, hardness and elastic modulus of silicon-carbon films were investigated after the deposition. The film surface is very smooth with root-mean-square roughness of 0.579 nm. Maximum hardness of coatings was 11 GPa, and maximum elastic modulus was 142 GPa. Режим доступа: по договору с организацией-держателем ресурса
Language:	English
Published:	2016
Series:	Discharge and Plasma-Beam Technology
Subjects:	электронный ресурс труды учёных ТПУ алмазоподобный углерод кремний-углерод пленки покрытия плазма крови дуговые разряды катоды
Online Access:	http://dx.doi.org/10.4028/www.scientific.net/KEM.685.643
Format:	Electronic Book Chapter
KOHA link:	https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=646506

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