The Deposition of Silicon-Carbon Coatings in Plasma Based Nonself-Sustained Arc Discharge with Heated Cathode; Key Engineering Materials; Vol. 685 : High Technology: Research and Applications 2015 (HTRA 2015)

The Deposition of Silicon-Carbon Coatings in Plasma Based Nonself-Sustained Arc Discharge with Heated Cathode; Key Engineering Materials; Vol. 685 : High Technology: Research and Applications 2015 (HTRA 2015)

Detalles Bibliográficos
Parent link:Key Engineering Materials: Scientific Journal
Vol. 685 : High Technology: Research and Applications 2015 (HTRA 2015).— 2016.— [P. 643-647]
Autor Corporativo: Национальный исследовательский Томский политехнический университет (ТПУ) Физико-технический институт (ФТИ) Кафедра теоретической и экспериментальной физики (ТиЭФ)
Otros Autores: Grenadyorov A. S., Oskomov K. V., Soloviev A. A. Andrey Aleksandrovich, Rabotkin S. V., Kovsharov N. F.
Sumario:Title screen
Silicon-carbon coatings on silicon substrates were deposited in plasma based nonself-sustained arc discharge with heated cathode by plasma polymerization of silicon organic agent such as polyphenyl methylsiloxane (PPhMS). Silicon-carbon coatings were deposited at PPhMS flow rate of 0.012 ml/min, argon pressure of 0-0.1 Pa, discharge current of 5-8 A, discharge voltage of 130-150 V, and filament current of 68 A. Bipolar pulsed bias voltage was supplied on the substrate during coating deposition. Surface morphology, hardness and elastic modulus of silicon-carbon films were investigated after the deposition. The film surface is very smooth with root-mean-square roughness of 0.579 nm. Maximum hardness of coatings was 11 GPa, and maximum elastic modulus was 142 GPa.
Режим доступа: по договору с организацией-держателем ресурса
Lenguaje:inglés
Publicado: 2016
Colección:Discharge and Plasma-Beam Technology
Materias:
электронный ресурс
труды учёных ТПУ
алмазоподобный углерод
кремний-углерод
пленки
покрытия
плазма крови
дуговые разряды
катоды
Acceso en línea:http://dx.doi.org/10.4028/www.scientific.net/KEM.685.643
Formato: Electrónico Capítulo de libro
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=646506

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