The Deposition of Silicon-Carbon Coatings in Plasma Based Nonself-Sustained Arc Discharge with Heated Cathode; Key Engineering Materials; Vol. 685 : High Technology: Research and Applications 2015 (HTRA 2015)
| Parent link: | Key Engineering Materials: Scientific Journal Vol. 685 : High Technology: Research and Applications 2015 (HTRA 2015).— 2016.— [P. 643-647] |
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| Collectivité auteur: | |
| Autres auteurs: | , , , , |
| Résumé: | Title screen Silicon-carbon coatings on silicon substrates were deposited in plasma based nonself-sustained arc discharge with heated cathode by plasma polymerization of silicon organic agent such as polyphenyl methylsiloxane (PPhMS). Silicon-carbon coatings were deposited at PPhMS flow rate of 0.012 ml/min, argon pressure of 0-0.1 Pa, discharge current of 5-8 A, discharge voltage of 130-150 V, and filament current of 68 A. Bipolar pulsed bias voltage was supplied on the substrate during coating deposition. Surface morphology, hardness and elastic modulus of silicon-carbon films were investigated after the deposition. The film surface is very smooth with root-mean-square roughness of 0.579 nm. Maximum hardness of coatings was 11 GPa, and maximum elastic modulus was 142 GPa. Режим доступа: по договору с организацией-держателем ресурса |
| Langue: | anglais |
| Publié: |
2016
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| Collection: | Discharge and Plasma-Beam Technology |
| Sujets: | |
| Accès en ligne: | http://dx.doi.org/10.4028/www.scientific.net/KEM.685.643 |
| Format: | Électronique Chapitre de livre |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=646506 |
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| 200 | 1 | |a The Deposition of Silicon-Carbon Coatings in Plasma Based Nonself-Sustained Arc Discharge with Heated Cathode |f A. S. Grenadyorov [et al.] | |
| 203 | |a Text |c electronic | ||
| 225 | 1 | |a Discharge and Plasma-Beam Technology | |
| 300 | |a Title screen | ||
| 330 | |a Silicon-carbon coatings on silicon substrates were deposited in plasma based nonself-sustained arc discharge with heated cathode by plasma polymerization of silicon organic agent such as polyphenyl methylsiloxane (PPhMS). Silicon-carbon coatings were deposited at PPhMS flow rate of 0.012 ml/min, argon pressure of 0-0.1 Pa, discharge current of 5-8 A, discharge voltage of 130-150 V, and filament current of 68 A. Bipolar pulsed bias voltage was supplied on the substrate during coating deposition. Surface morphology, hardness and elastic modulus of silicon-carbon films were investigated after the deposition. The film surface is very smooth with root-mean-square roughness of 0.579 nm. Maximum hardness of coatings was 11 GPa, and maximum elastic modulus was 142 GPa. | ||
| 333 | |a Режим доступа: по договору с организацией-держателем ресурса | ||
| 461 | 0 | |0 (RuTPU)RU\TPU\network\11477 |t Key Engineering Materials |o Scientific Journal | |
| 463 | 0 | |0 (RuTPU)RU\TPU\network\11478 |t Vol. 685 : High Technology: Research and Applications 2015 (HTRA 2015) |o The IV International Conference, April 21-24, 2015, Tomsk, Russia |o [proceedings] |f National Research Tomsk Polytechnic University (TPU) ; ed. N. V. Martyushev, A. M. Bogdan |v [P. 643-647] |d 2016 | |
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| 701 | 1 | |a Grenadyorov |b A. S. | |
| 701 | 1 | |a Oskomov |b K. V. | |
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