Metal Surface Treatment with Particle Fluxes Taking into Account the Internal Boundary; Key Engineering Materials; Vol. 685 : High Technology: Research and Applications 2015 (HTRA 2015)
| Parent link: | Key Engineering Materials: Scientific Journal Vol. 685 : High Technology: Research and Applications 2015 (HTRA 2015).— 2016.— [P. 413-416] |
|---|---|
| Hlavní autor: | Parfenova E. S. Elena Sergeevna |
| Korporativní autor: | Национальный исследовательский Томский политехнический университет (ТПУ) Институт физики высоких технологий (ИФВТ) Кафедра физики высоких технологий в машиностроении (ФВТМ) |
| Další autoři: | Knyazeva A. G. Anna Georgievna |
| Shrnutí: | Title screen In this paper, the isothermal model of the initial stage of ion implantation process taking into account internal boundary is presented. It is assumed that implantable impurity generates mechanical perturbations. These waves can propagate with different velocities before and after the border. The examples of the waveform evolution at transition across the boundary for different combinations of the model parameters are presented. Режим доступа: по договору с организацией-держателем ресурса |
| Jazyk: | angličtina |
| Vydáno: |
2016
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| Edice: | Mechanical Engineering Technology |
| Témata: | |
| On-line přístup: | http://dx.doi.org/10.4028/www.scientific.net/KEM.685.413 |
| Médium: | MixedMaterials Elektronický zdroj Kapitola |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=646453 |
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