Metal Surface Treatment with Particle Fluxes Taking into Account the Internal Boundary; Key Engineering Materials; Vol. 685 : High Technology: Research and Applications 2015 (HTRA 2015)

Dades bibliogràfiques
Parent link:Key Engineering Materials: Scientific Journal
Vol. 685 : High Technology: Research and Applications 2015 (HTRA 2015).— 2016.— [P. 413-416]
Autor principal: Parfenova E. S. Elena Sergeevna
Autor corporatiu: Национальный исследовательский Томский политехнический университет (ТПУ) Институт физики высоких технологий (ИФВТ) Кафедра физики высоких технологий в машиностроении (ФВТМ)
Altres autors: Knyazeva A. G. Anna Georgievna
Sumari:Title screen
In this paper, the isothermal model of the initial stage of ion implantation process taking into account internal boundary is presented. It is assumed that implantable impurity generates mechanical perturbations. These waves can propagate with different velocities before and after the border. The examples of the waveform evolution at transition across the boundary for different combinations of the model parameters are presented.
Режим доступа: по договору с организацией-держателем ресурса
Idioma:anglès
Publicat: 2016
Col·lecció:Mechanical Engineering Technology
Matèries:
Accés en línia:http://dx.doi.org/10.4028/www.scientific.net/KEM.685.413
Format: Electrònic Capítol de llibre
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=646453