Metal Surface Treatment with Particle Fluxes Taking into Account the Internal Boundary; Key Engineering Materials; Vol. 685 : High Technology: Research and Applications 2015 (HTRA 2015)

Detalhes bibliográficos
Parent link:Key Engineering Materials: Scientific Journal
Vol. 685 : High Technology: Research and Applications 2015 (HTRA 2015).— 2016.— [P. 413-416]
Autor principal: Parfenova E. S. Elena Sergeevna
Autor Corporativo: Национальный исследовательский Томский политехнический университет (ТПУ) Институт физики высоких технологий (ИФВТ) Кафедра физики высоких технологий в машиностроении (ФВТМ)
Outros Autores: Knyazeva A. G. Anna Georgievna
Resumo:Title screen
In this paper, the isothermal model of the initial stage of ion implantation process taking into account internal boundary is presented. It is assumed that implantable impurity generates mechanical perturbations. These waves can propagate with different velocities before and after the border. The examples of the waveform evolution at transition across the boundary for different combinations of the model parameters are presented.
Режим доступа: по договору с организацией-держателем ресурса
Idioma:inglês
Publicado em: 2016
Colecção:Mechanical Engineering Technology
Assuntos:
Acesso em linha:http://dx.doi.org/10.4028/www.scientific.net/KEM.685.413
Formato: Recurso Electrónico Capítulo de Livro
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=646453
Descrição
Resumo:Title screen
In this paper, the isothermal model of the initial stage of ion implantation process taking into account internal boundary is presented. It is assumed that implantable impurity generates mechanical perturbations. These waves can propagate with different velocities before and after the border. The examples of the waveform evolution at transition across the boundary for different combinations of the model parameters are presented.
Режим доступа: по договору с организацией-держателем ресурса
DOI:10.4028/www.scientific.net/KEM.685.413