Features of Difference Scheme for the Diffusion-Kinetic Problem of Ion Implantation with Intermetallic Phases Formation

Features of Difference Scheme for the Diffusion-Kinetic Problem of Ion Implantation with Intermetallic Phases Formation

Bibliographic Details
Parent link:Key Engineering Materials: Scientific Journal
Vol. 685 : High Technology: Research and Applications 2015 (HTRA 2015).— 2016.— [P. 195-199]
Main Author: Asfandyar K.
Corporate Author: Национальный исследовательский Томский политехнический университет (ТПУ) Институт физики высоких технологий (ИФВТ) Кафедра физики высоких технологий в машиностроении (ФВТМ)
Other Authors: Knyazeva A. G. Anna Georgievna
Summary:Title screen
The implicit difference scheme has been suggested for the solution of diffusion-kinetic problem describing the ion implantation by intermetallic phase formation. The model corresponds to irreversible conditions and includes finite relaxation times for mass fluxes. The linear difference equations are solved by double-sweep method. The result illustrates the convergence of difference scheme at variation of its parameters. Qualitative picture of phase evolution in the surface layer is obtained different for problem with finite relaxation times and for zero relaxation times.
Режим доступа: по договору с организацией-держателем ресурса
Language:English
Published: 2016
Series:Numerical Simulation of Physical and Chemical Processes
Subjects:
электронный ресурс
труды учёных ТПУ
интерметаллиды
ионная имплантация
релаксация
разностные схемы
диффузно-тепловая неустойчивость
Online Access:http://dx.doi.org/10.4028/www.scientific.net/KEM.685.195
Format: Electronic Book Chapter
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=646431

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