APA (7th ed.) Citation

Shugurov V. V. Vladimir Viktorovich, Denisov V. V., Kalushevich A. A., Yakovlev V. V., Vorobjev M. S. Maksim Sergeevich, Suslov A. I., & Koval N. N. Nikolay Nikolaevich. (2012). A silicon films deposition in the process of SIF 4 decomposition in pulsed glow discharge. 2012.

Chicago Style (17th ed.) Citation

Shugurov V. V. Vladimir Viktorovich, Denisov V. V., Kalushevich A. A., Yakovlev V. V., Vorobjev M. S. Maksim Sergeevich, Suslov A. I., and Koval N. N. Nikolay Nikolaevich. A Silicon Films Deposition in the Process of SIF 4 Decomposition in Pulsed Glow Discharge. 2012, 2012.

MLA (9th ed.) Citation

Shugurov V. V. Vladimir Viktorovich, et al. A Silicon Films Deposition in the Process of SIF 4 Decomposition in Pulsed Glow Discharge. 2012, 2012.