Energy and substance transfer in magnetron sputtering systems with liquid-phase target; Vacuum; Vol. 124
| Parent link: | Vacuum Vol. 124.— 2016.— [P. 11-17] |
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| Autor kompanije: | |
| Daljnji autori: | , , , |
| Sažetak: | Title screen The regularities of energy and matter transfer in the magnetron sputtering systems (MSS) with liquid-phase targets were analyzed. For this purpose a mathematical model of heat and erosion processes in a thermally insulated target of MSS has been developed and the problem of energy balance in a substrate and its heating during coating deposition was solved. The model is based on the fact that the flow of atoms from the surface of the liquid-phase target under the action of plasma consists of two independent components: sputtered and vaporized particles. The reliability of this model is confirmed by a good agreement between the calculated and experimental data. Using the model developed the regularities of the rate of the target surface erosion and metal coatings deposition were revealed. We investigated the effect of the ion current power density and material properties of the cathode. The calculations according to this model and experiments show the growth rate of metal coatings reaches from 100 to 1000 nm/s when intense evaporation occurs. It is one or two orders of magnitude higher than the rate of coating deposition when using solid target. The results can be useful for the development of technologies of high-rate coating deposition. Режим доступа: по договору с организацией-держателем ресурса |
| Jezik: | engleski |
| Izdano: |
2016
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| Teme: | |
| Online pristup: | http://dx.doi.org/10.1016/j.vacuum.2015.11.009 |
| Format: | MixedMaterials Elektronički Poglavlje knjige |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=645928 |
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| 200 | 1 | |a Energy and substance transfer in magnetron sputtering systems with liquid-phase target |f G. A. Bleykher (Bleicher) [et al.] | |
| 203 | |a Text |c electronic | ||
| 300 | |a Title screen | ||
| 320 | |a [References: 18 tit.] | ||
| 330 | |a The regularities of energy and matter transfer in the magnetron sputtering systems (MSS) with liquid-phase targets were analyzed. For this purpose a mathematical model of heat and erosion processes in a thermally insulated target of MSS has been developed and the problem of energy balance in a substrate and its heating during coating deposition was solved. The model is based on the fact that the flow of atoms from the surface of the liquid-phase target under the action of plasma consists of two independent components: sputtered and vaporized particles. The reliability of this model is confirmed by a good agreement between the calculated and experimental data. Using the model developed the regularities of the rate of the target surface erosion and metal coatings deposition were revealed. We investigated the effect of the ion current power density and material properties of the cathode. The calculations according to this model and experiments show the growth rate of metal coatings reaches from 100 to 1000 nm/s when intense evaporation occurs. It is one or two orders of magnitude higher than the rate of coating deposition when using solid target. The results can be useful for the development of technologies of high-rate coating deposition. | ||
| 333 | |a Режим доступа: по договору с организацией-держателем ресурса | ||
| 461 | |t Vacuum | ||
| 463 | |t Vol. 124 |v [P. 11-17] |d 2016 | ||
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| 701 | 1 | |a Bleykher (Bleicher) |b G. A. |c physicist |c Professor of Tomsk Polytechnic University, Doctor of Physical and Mathematical Sciences |f 1961- |g Galina Alekseevna |3 (RuTPU)RU\TPU\pers\31496 |9 15657 | |
| 701 | 1 | |a Krivobokov |b V. P. |c Russian physicist |c professor of Tomsk Polytechnic University (TPU), Doctor of Physical and Mathematical Sciences (DSc) |f 1948- |g Valery Pavlovich |3 (RuTPU)RU\TPU\pers\30416 |9 14757 | |
| 701 | 1 | |a Yuryeva |b A. V. |c specialist in the field of hydrogen energy and plasma technologies |c Associate Professor of Tomsk Polytechnic University, Candidate of Technical Sciences |f 1983- |g Alena Victorovna |3 (RuTPU)RU\TPU\pers\33389 |9 17084 | |
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