Magnetron deposition of coatings with evaporation of the target; Technical Physics; Vol. 60, №12

Magnetron deposition of coatings with evaporation of the target; Technical Physics; Vol. 60, №12

Chi tiết về thư mục
Parent link:	Technical Physics.— , 1931- Vol. 60, №12.— 2015.— [P. 1790-1795]
Tác giả chính:	Bleykher (Bleicher) G. A. Galina Alekseevna
Tác giả của công ty:	Национальный исследовательский Томский политехнический университет
Tác giả khác:	Krivobokov V. P. Valery Pavlovich, Yuryeva A. V. Alena Victorovna
Tóm tắt:	Title screen We analyze the potentialities of the plasma in various types of magnetron sputtering systems including pulsed and liquid-target systems for producing intense emission of atoms and high-rate deposition of coatings. For this purpose, a mathematical model of thermal and erosion processes in the target is developed based on the heat conduction equations taking into account first-order phase transitions. Using this model, we determine the parameters of magnetrons for which intense evaporation of atoms from the target surface takes place. It is shown that evaporation leads to an increase in the growth rate of metal coatings by 1–2 orders of magnitude as compared to conventional magnetron systems based only on collisional sputtering. Режим доступа: по договору с организацией-держателем ресурса
Ngôn ngữ:	Tiếng Anh
Được phát hành:	2015
Loạt:	Plasma
Những chủ đề:	электронный ресурс труды учёных ТПУ магнетронное осаждение испарения
Truy cập trực tuyến:	http://dx.doi.org/10.1134/S1063784215120026
Định dạng:	Điện tử Chương của sách
KOHA link:	https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=645798

Những quyển sách tương tự

Surface erosion of hot Cr target and deposition rates of Cr coatings in high power pulsed magnetron sputtering; Surface and Coatings Technology; Vol. 354
Được phát hành: (2018)

The energy flux onto substrate during coating deposition using magnetron with liquid metal target; Energy Fluxes and Radiation Effects (EFRE-2016)
Bằng: Bleykher (Bleicher) G. A. Galina Alekseevna
Được phát hành: (2016)

Magnetron deposition of chromium nitride coatings using a hot chromium target: Influence of magnetron power on the deposition rate and elemental composition; Surface and Coatings Technology; Vol. 433
Được phát hành: (2022)

Магнетронное осаждение покрытий с испарением мишени; Журнал технической физики; Т. 85, вып. 12
Bằng: Блейхер Г. А. Галина Алексеевна
Được phát hành: (2015)

Features of self-sustained magnetron sputtering of evaporating metal target; Gas Discharge Plasmas and Their Applications (GDP 2019)
Được phát hành: (2019)

High-rate deposition of chromium coatings by magnetron sputtering; Gas Discharge Plasmas and Their Applications (GDP 2019)
Được phát hành: (2019)

Hot target magnetron sputtering enhanced by RF-ICP source for CrNx coatings deposition; Vacuum; Vol. 191
Được phát hành: (2021)

Nickel and Chromium Deposition by Hot Target Magnetron Sputtering; Surface Modification of Materials by Ion Beams (SMMIB-2019)
Được phát hành: (2019)

Ntibacterial potential of Zn- and Cu- substituted hydroxyapatite coatings deposited by RF-magnetron sputtering: structure and properties; Gas Discharge Plasmas and Their Applications (GDP 2019)
Được phát hành: (2019)

Analysis of Magnetron-Deposited Titanium Oxynitride Coatings by Scanning Electron Microscopy and Raman Scattering; Advanced Materials Research : Radiation and nuclear techniques in material science; Vol. 1084 : Physical-Technical Problems of Nuclear Science, Energy Generation, and Power Industry (PTPAI -2014)
Được phát hành: (2015)

Deposition of calcium phosphate coatings using radio frequency magnetron sputtering of substituted β-tricalcium phosphate targets; Journal of Physics: Conference Series; Vol. 1115 : 6th International Congress "Energy Fluxes and Radiation Effects". 14th International Conference on Modification of Materials with Particle Beams and Plasma Flows (14th CMM)
Được phát hành: (2018)

Magnetron sputtering with hot solid target: thermal processes and erosion; Acta Polytechnica; Vol. 56, № 6
Được phát hành: (2016)

Magnetron deposition of metal-ceramic protective coatings on glasses of windows of space vehicles; AIP Conference Proceedings; Vol. 1623 : International Conference on Physical Mesomechanics of Multilevel Systems 2014, Tomsk, Russia, 3–5 September 2014
Được phát hành: (2014)

Deposition of the low resistive ITO-films by means of reactive magnetron sputtering of the In/Sn target on the cold substrate; IOP Conference Series: Materials Science and Engineering; Vol. 135 : Issues of Physics and Technology in Science, Industry and Medicine
Được phát hành: (2016)

Hot target magnetron sputtering for ferromagnetic films deposition; Surface and Coatings Technology; Vol. 334
Được phát hành: (2018)

Metal Coatings Deposition Using Hot Target Magnetrons; Surface Modification of Materials by Ion Beams (SMMIB-2019)
Được phát hành: (2019)

Features of copper coatings growth at high-rate deposition using magnetron sputtering systems with a liquid metal target; Surface and Coatings Technology; Vol. 324
Được phát hành: (2017)

Effect of Glancing Angle Deposition to the Morphology of Calcium Phosphate Thin Coatings; Surface Modification of Materials by Ion Beams (SMMIB-2019)
Được phát hành: (2019)

Magnetron deposition of TCO films using ion beam; Journal of Physics: Conference Series; Vol. 652 : Gas Discharge Plasmas and Their Applications (GDP 2015)
Bằng: Asainov O. Kh. Oleg Khaydarovich
Được phát hành: (2015)

Chromium films deposition by hot target high power pulsed magnetron sputtering: Deposition conditions and film properties; Surface and Coatings Technology; Vol. 375
Được phát hành: (2019)

Characterzations of nitrogen-doped titanium dioxide films prepared by reactive magnetron sputtering deposition; Energy Fluxes and Radiation Effects (EFRE-2016)
Bằng: Pichugin V. F. Vladimir Fyodorovich
Được phát hành: (2016)

Chromium coatings deposited by cooled and hot target magnetron sputtering for accident tolerant nuclear fuel claddings; Surface and Coatings Technology; Vol. 389
Được phát hành: (2020)

Electrophoretic deposition and radio-frequency magnetron sputtering asmethods for modification of additive manufactured Ti-6Al-4V; Перспективные материалы с иерархической структурой для новых технологий и надежных конструкций
Được phát hành: (2017)

Magnetron Deposition of Cr Coatings with RF-ICP Assistance; Coatings; Vol. 12, iss. 10
Được phát hành: (2022)

Peculiarities of metal coatings deposition using magnetron sputtering systems with hot and evaporative targets; Journal of Physics: Conference Series; Vol. 1115 : 6th International Congress "Energy Fluxes and Radiation Effects". 14th International Conference on Modification of Materials with Particle Beams and Plasma Flows (14th CMM)
Được phát hành: (2018)

Controlling the Properties of Metal Films Deposited Using Magnetron Sputtering Systems with Evaporative Targets; Surface Modification of Materials by Ion Beams (SMMIB-2019)
Được phát hành: (2019)

RF magnetron-sputtered coatings deposited from biphasic calcium phosphate targets for biomedical implant applications; Bioactive Materials; Vol. 2, iss. 3
Được phát hành: (2017)

Medical nanofilms of titanium oxynitride deposited by reactive magnetron sputtering; Nanoparticles, nanostructured coatings and microcontainers: technology, properties, applications
Bằng: Boytsova E. L. Elena Lvovna
Được phát hành: (2016)

High-rate magnetron sputtering with hot target; Surface and Coatings Technology; Vol. 308 : The 43rd International Conference on Metallurgical Coatings and Thin Films
Được phát hành: (2016)

Formation of Ti-Al-Cr-B-N Coatings by Ion-Magnetron Sputtering of Composite Targets; AIP Conference Proceedings; Vol. 1909 : Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2017 (AMHS’17)
Được phát hành: (2017)

Adhesion properties of a three-layer system based on RF-magnetron sputter deposited calcium-phosphate coating and silver nanoparticles; 11th International Forum on Strategic Technology (IFOST 2016); Pt. 1
Được phát hành: (2016)

Thermal processes and emission of atoms from the liquid phase target surface of a magnetron sputtering system; Russian Physics Journal; Vol. 58, № 4
Bằng: Bleykher (Bleicher) G. A. Galina Alekseevna
Được phát hành: (2015)

The role of electrophoretic deposition method in the creation of a biocomposit based on hydroxyapatite layers and silver nanoparticles; Перспективы развития фундаментальных наук; Т. 1 : Физика
Bằng: Sharonova A. A. Anna Aleksandrovna
Được phát hành: (2018)

Physical principles of radio-frequency magnetron sputter deposition of calcium-phosphate-based coating with tailored properties; Surface and Coatings Technology; Vol. 413
Được phát hành: (2021)

Effect of Magnetron Deposition Conditions on the Structure, Phase Composition and Properties of the Coatings on the Basis of the Al-Si-N System; AIP Conference Proceedings; Vol. 1909 : Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2017 (AMHS’17)
Được phát hành: (2017)

Glancing Angle Deposition of Zn-Doped Calcium Phosphate Coatings by RF Magnetron Sputtering; Coatings; Vol. 9, iss. 4
Được phát hành: (2019)

A comparative study on the properties of chromium coatings deposited by agnetron sputtering with hot and cooled cathode; Energy Fluxes and Radiation Effects (EFRE-2016)
Được phát hành: (2016)

Tribological Properties and Microstructure of Gradient Nanocomposite Coatings on the Basis of Ti-Al-Cr-B-N; Advanced Materials Research; Vol. 1085 : Prospects of Fundamental Sciences Development (PFSD-2014)
Được phát hành: (2015)

Measuring the Rate of Local Evaporation from the Liquid Surface under the Action of Gas Flow; Technical Physics Letters; Vol. 41, № 14
Được phát hành: (2015)

Magnetron Sputtering Deposition of Intermetallic Coatings Using Tin and Niobium Plasma; Russian Physics Journal; Vol. 65, iss. 11
Được phát hành: (2023)