A high-current impulse implanter; Instruments and Experimental Techniques; Vol. 58, iss. 5/1
| Parent link: | Instruments and Experimental Techniques.— , 1956- Vol. 58, iss. 5/1.— 2015.— [P. 708-710] |
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| Autore principale: | |
| Ente Autore: | |
| Altri autori: | , |
| Riassunto: | Title screen A high-current impulse implanter on the basis of a high-current ion diode with a radial magnetic field and preliminary plasma production is described. Plasma is formed at the diode anode using a negative voltage pulse that precedes an accelerating-voltage pulse. The pause between pulses is 500 ± 50 ns. Graphite is used as the emission coating on the anode. An ion beam with a current density in the diode focal plane of up to 80 A/cm2 was obtained. Analysis of the elemental composition of the ion beam using the time-of-flight technique showed that the ion beam consists mainly of С+and С+2 carbon ions and Н+ protons. Режим доступа: по договору с организацией-держателем ресурса |
| Lingua: | inglese |
| Pubblicazione: |
2015
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| Soggetti: | |
| Accesso online: | http://dx.doi.org/10.1134/S0020441215040247 |
| Natura: | MixedMaterials Elettronico Capitolo di libro |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=645173 |
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| 200 | 1 | |a A high-current impulse implanter |f A. V. Stepanov, V. I. Shamanin , G. E. Remnev | |
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| 300 | |a Title screen | ||
| 320 | |a [References: 9 tit.] | ||
| 330 | |a A high-current impulse implanter on the basis of a high-current ion diode with a radial magnetic field and preliminary plasma production is described. Plasma is formed at the diode anode using a negative voltage pulse that precedes an accelerating-voltage pulse. The pause between pulses is 500 ± 50 ns. Graphite is used as the emission coating on the anode. An ion beam with a current density in the diode focal plane of up to 80 A/cm2 was obtained. Analysis of the elemental composition of the ion beam using the time-of-flight technique showed that the ion beam consists mainly of С+and С+2 carbon ions and Н+ protons. | ||
| 333 | |a Режим доступа: по договору с организацией-держателем ресурса | ||
| 461 | |t Instruments and Experimental Techniques |d 1956- | ||
| 463 | |t Vol. 58, iss. 5/1 |v [P. 708-710] |d 2015 | ||
| 610 | 1 | |a электронный ресурс | |
| 610 | 1 | |a труды учёных ТПУ | |
| 700 | 1 | |a Stepanov |b A. V. |c physicist |c Researcher of Tomsk Polytechnic University |f 1981- |g Andrey Vladimirovich |3 (RuTPU)RU\TPU\pers\32029 |9 16076 | |
| 701 | 1 | |a Shamanin |b V. I. | |
| 701 | 1 | |a Remnev |b G. E. |c physicist |c Professor of Tomsk Polytechnic University, Doctor of technical sciences |f 1948- |g Gennady Efimovich |3 (RuTPU)RU\TPU\pers\31500 | |
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