Formation of heavily doped semiconductor layers by pulsed ion beam treatmen; Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms; Vol. 122, iss. 1

Formation of heavily doped semiconductor layers by pulsed ion beam treatmen; Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms; Vol. 122, iss. 1

Bibliografski detalji
Parent link:	Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms: Scientific Journal.— , 1984- Vol. 122, iss. 1.— 1997.— [P. 35-38]
Daljnji autori:	Bayazitov R. M., Zakirzyanova L. Kh., Khaibullin I. B., Remnev G. E. Gennady Efimovich
Sažetak:	Title screen The formation of heavily doped Si and GaAs layers using implantation and powerful pulsed ion beams has been investigated. The influence of the depth distribution of energy released by the ions on the temperature profile and the electrically active impurity distribution in Si and GaAs is analyzed. It is shown that as a consequence of the simultaneous action of impurity diffusion processes normal to the surface and decomposition of GaAs at the surface, the heavily doped (8 × 1019cm−3) layers are formed in the subsurface region (0.1-0.5 μm). Режим доступа: по договору с организацией-держателем ресурса
Jezik:	engleski
Izdano:	1997
Teme:	электронный ресурс труды учёных ТПУ
Online pristup:	http://dx.doi.org/10.1016/S0168-583X(96)00637-4
Format:	Elektronički Poglavlje knjige
KOHA link:	https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=645131

Slični predmeti

Pulsed ion beam formation of highly doped GaAs layers; Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms; Vol. 139, iss. 1-4
Izdano: (1998)

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Izdano: (Amsterdam, Elsevier, 1998-)

Simulation and experimental studies on the formation of high-power titanium ion beams for the synergy of ion implantation and energy impact on the surface; Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms; Vol. 533
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Formation of tin-tin oxide core-shell nanoparticles in the composite SnO2−x/nitrogen-doped carbon nanotubes by pulsed ion beam irradiation; Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms; Vol. 394
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Ion processing of alumina ceramics by high-power pulsed beams; Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms; Vol. 434
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Ion modification of alumina ceramics; Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms; Vol. 464
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Investigation of kinetics of lithium ferrite formation under electron beam treatment; Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms; Vol. 466
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Surface modification of AISI-4620 steel with intense pulsed ion beams; Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms; Vol. 127-128
Izdano: (1997)

Vol. 136-138; Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Izdano: (1998)

Structure modifications and mechanical properties of alloys exposed to pulsed ion beams; Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms; Vol. 17, iss. 2
Izdano: (1986)

Atomic and nuclear physics methods for structure studies of metals and alloys exposed to high power ion beams; Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms; Vol. 27, iss. 3
Izdano: (1987)

Experimental evidence of energetic neutrals production in an ion diode; Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms; Vol. 343
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Dynamical processes and changes in metal structure induced by high power ion beams; Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms; Vol. 42, iss. 3
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Surface microstructure and phase structure of zirconia ceramics under intense pulsed ion beam irradiation; Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms; Vol. 542
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Vol. 134, iss. 1; Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Izdano: (1998)

Vol. 134, iss. 2; Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Izdano: (1998)

Vol. 142, iss. 3; Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Izdano: (1998)

Vol. 142, iss. 4; Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Izdano: (1998)

Vol. 143, iss. 3; Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Izdano: (1998)

Vol. 143, iss. 4; Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Izdano: (1998)

Vol. 145, № 1-2; Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Izdano: (1998)

Vol. 145, iss. 3; Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Izdano: (1998)

Vol. 145, iss. 4; Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
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Multicrystal undulator; Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms; Vol. 402
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Muon beam channeling in a laser standing wave; Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms; Vol. 402
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Thermal field induced by intense pulsed ion beam and its possible application in thermal diffusivity measurement; Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms; Vol. 409
Izdano: (2017)

Erosion yield of metal surface under ion pulsed irradiation; Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms; Vol. 315
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Izdano: (2013)

Vol. 140, iss. 1-2; Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Izdano: (1998)

Vol. 140, iss. 3-4; Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Izdano: (1998)

Vol. 141, iss. 1-4; Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Izdano: (1998)

Vol. 139, iss. 1-4; Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Izdano: (1998)

Vol. 142, iss. 1-2; Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Izdano: (1998)

Vol. 134, iss. 3-4; Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Izdano: (1998)

Vol. 135, iss. 1-4; Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Izdano: (1998)

Vol. 143, iss. 1-2; Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Izdano: (1998)

Vol. 144, iss. 1-4; Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
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Vol. 146, iss. 1-4; Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
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Master Index Vol. 121-130; Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
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Structural, physical and chemical changes induced in metals and alloys exposed to high power ion beams; Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms; Vol. 36, iss. 3
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