Magnetron deposition of TCO films using ion beam; Journal of Physics: Conference Series; Vol. 652 : Gas Discharge Plasmas and Their Applications (GDP 2015)
| Parent link: | Journal of Physics: Conference Series Vol. 652 : Gas Discharge Plasmas and Their Applications (GDP 2015).— 2015.— [012046, 4 p.] |
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| Zusammenfassung: | Title screen Thin films of tin oxide (TO) were deposited on the glass substrates at room temperature using reactive magnetron sputtering at various oxygen partial pressures. After the deposition the films were irradiated with argon ions beam. The change of the optical and electrical properties of the films depending on the irradiation time was studied. Films optical properties in the range of 300-1100 nm were investigated by photometry as well as their structural properties were studied using X-ray diffraction. Diffractometric research showed that the films, deposited on a substrate, have a crystal structure, and after argon ions irradiation they become quasi-crystalline (amorphous). It was found that the transmission increases proportionally with the irradiation time, but the surface resistance -disproportionally. Режим доступа: по договору с организацией-держателем ресурса |
| Sprache: | Englisch |
| Veröffentlicht: |
2015
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| Schlagworte: | |
| Online-Zugang: | http://dx.doi.org/10.1088/1742-6596/652/1/012046 http://earchive.tpu.ru/handle/11683/18225 |
| Format: | Elektronisch Buchkapitel |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=644620 |
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| LEADER | 00000nla2a2200000 4500 | ||
|---|---|---|---|
| 001 | 644620 | ||
| 005 | 20260715071707.0 | ||
| 035 | |a (RuTPU)RU\TPU\network\9703 | ||
| 035 | |a RU\TPU\network\9702 | ||
| 090 | |a 644620 | ||
| 100 | |a 20151123a2015 k y0engy50 ba | ||
| 101 | 0 | |a eng | |
| 102 | |a GB | ||
| 105 | |a y z 101zy | ||
| 135 | |a drcn ---uucaa | ||
| 181 | 0 | |a i | |
| 182 | 0 | |a b | |
| 200 | 1 | |a Magnetron deposition of TCO films using ion beam |f O. Kh. Asainov, S. P. Umnov, A. Chinin | |
| 203 | |a Text |c electronic | ||
| 300 | |a Title screen | ||
| 320 | |a [References: 12 tit.] | ||
| 330 | |a Thin films of tin oxide (TO) were deposited on the glass substrates at room temperature using reactive magnetron sputtering at various oxygen partial pressures. After the deposition the films were irradiated with argon ions beam. The change of the optical and electrical properties of the films depending on the irradiation time was studied. Films optical properties in the range of 300-1100 nm were investigated by photometry as well as their structural properties were studied using X-ray diffraction. Diffractometric research showed that the films, deposited on a substrate, have a crystal structure, and after argon ions irradiation they become quasi-crystalline (amorphous). It was found that the transmission increases proportionally with the irradiation time, but the surface resistance -disproportionally. | ||
| 333 | |a Режим доступа: по договору с организацией-держателем ресурса | ||
| 461 | 1 | |0 (RuTPU)RU\TPU\network\3526 |t Journal of Physics: Conference Series | |
| 463 | 0 | |0 (RuTPU)RU\TPU\network\9636 |t Vol. 652 : Gas Discharge Plasmas and Their Applications (GDP 2015) |o 12th International Conference, 6–11 September 2015, Tomsk, Russia |o [proceedings] |v [012046, 4 p.] |d 2015 | |
| 610 | 1 | |a труды учёных ТПУ | |
| 610 | 1 | |a электронный ресурс | |
| 610 | 1 | |a магнетронное осаждение | |
| 610 | 1 | |a ионные пучки | |
| 610 | 1 | |a тонкие пленки | |
| 610 | 1 | |a магнетронные напыления | |
| 610 | 1 | |a оптические свойства | |
| 610 | 1 | |a рентгеновские лучи | |
| 610 | 1 | |a дифракция | |
| 610 | 1 | |a кристаллические структуры | |
| 700 | 1 | |a Asainov |b O. Kh. |c physicist |c Head of the laboratory of Tomsk Polytechnic University, Candidate of physical and mathematical sciences |f 1957- |g Oleg Khaydarovich |3 (RuTPU)RU\TPU\pers\34632 | |
| 701 | 1 | |a Umnov |b S. P. |c physicist |c Senior researcher of Tomsk Polytechnic University, Candidate of physical and mathematical sciences |f 1957- |g Sergey Pavlovich |3 (RuTPU)RU\TPU\pers\34215 | |
| 701 | 1 | |a Chinin |b A. | |
| 712 | 0 | 2 | |a Томский политехнический университет |c 1991- |7 ca |8 rus |9 26305 |
| 801 | 1 | |a RU |b 63413507 |c 20151005 | |
| 801 | 2 | |a RU |b 63413507 |c 20161122 |g RCR | |
| 850 | |a 63413507 | ||
| 856 | 4 | 0 | |u http://dx.doi.org/10.1088/1742-6596/652/1/012046 |
| 856 | 4 | 0 | |u http://earchive.tpu.ru/handle/11683/18225 |
| 942 | |c CF | ||