APA (7th ed.) Citation

Asainov O. Kh. Oleg Khaydarovich, Umnov S. P. Sergey Pavlovich, & Chinin A. (2015). Magnetron deposition of TCO films using ion beam; Journal of Physics: Conference Series; Vol. 652 : Gas Discharge Plasmas and Their Applications (GDP 2015). 2015. https://doi.org/10.1088/1742-6596/652/1/012046

Chicago Style (17th ed.) Citation

Asainov O. Kh. Oleg Khaydarovich, Umnov S. P. Sergey Pavlovich, and Chinin A. Magnetron Deposition of TCO Films Using Ion Beam; Journal of Physics: Conference Series; Vol. 652 : Gas Discharge Plasmas and Their Applications (GDP 2015). 2015, 2015. https://doi.org/10.1088/1742-6596/652/1/012046.

MLA (9th ed.) Citation

Asainov O. Kh. Oleg Khaydarovich, et al. Magnetron Deposition of TCO Films Using Ion Beam; Journal of Physics: Conference Series; Vol. 652 : Gas Discharge Plasmas and Their Applications (GDP 2015). 2015, 2015. https://doi.org/10.1088/1742-6596/652/1/012046.