Manufacturing of regular microstructures by methods of LIGA - Technologies

Manufacturing of regular microstructures by methods of LIGA - Technologies

Bibliographic Details
Parent link:The 7th International Forum on Strategic Technology (IFOST-2012), September 18-21, 2012, Tomsk: [proceedings]/ National Research Tomsk Polytechnic University (TPU). [4 p.].— , 2012
Other Authors: Аumalikova М. N., Timchenko N. A. Nikolay Alekseevich, Kuznetsov S. I. Sergey Ivanovich, Goldenberg B. G., Pindurin V. F., Litvin S. V., Kanaev V. G.
Summary:Title screen
The results of the work on the creation of regular microstructures using deep x-ray lithography with synchrotron radiation are presented. The characteristics of the main processes of supporting membranes formation, absorbing layers and topological templates, as well as the results of measurements of the resulting structures when exposed to the channel of synchrotron radiation are presented.
Режим доступа: по договору с организацией-держателем ресурса
Published: 2012
Subjects:
труды учёных ТПУ
электронный ресурс
Online Access:http://dx.doi.org/10.1109/IFOST.2012.6357553
Format: Electronic Book Chapter
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=644328

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