Manufacturing of regular microstructures by methods of LIGA - Technologies
| Parent link: | The 7th International Forum on Strategic Technology (IFOST-2012), September 18-21, 2012, Tomsk: [proceedings]/ National Research Tomsk Polytechnic University (TPU). [4 p.].— , 2012 |
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| Andre forfattere: | , , , , , , |
| Summary: | Title screen The results of the work on the creation of regular microstructures using deep x-ray lithography with synchrotron radiation are presented. The characteristics of the main processes of supporting membranes formation, absorbing layers and topological templates, as well as the results of measurements of the resulting structures when exposed to the channel of synchrotron radiation are presented. Режим доступа: по договору с организацией-держателем ресурса |
| Sprog: | engelsk |
| Udgivet: |
2012
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| Fag: | |
| Online adgang: | http://dx.doi.org/10.1109/IFOST.2012.6357553 |
| Format: | Electronisk Book Chapter |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=644328 |
MARC
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| 200 | 1 | |a Manufacturing of regular microstructures by methods of LIGA - Technologies |f М. N. Аumalikova [et al.] | |
| 203 | |a Text |c electronic | ||
| 300 | |a Title screen | ||
| 320 | |a [References: 3 tit.] | ||
| 330 | |a The results of the work on the creation of regular microstructures using deep x-ray lithography with synchrotron radiation are presented. The characteristics of the main processes of supporting membranes formation, absorbing layers and topological templates, as well as the results of measurements of the resulting structures when exposed to the channel of synchrotron radiation are presented. | ||
| 333 | |a Режим доступа: по договору с организацией-держателем ресурса | ||
| 463 | 1 | |0 (RuTPU)RU\TPU\network\10411 |t The 7th International Forum on Strategic Technology (IFOST-2012), September 18-21, 2012, Tomsk |o [proceedings] |f National Research Tomsk Polytechnic University (TPU) |v [4 p.] |d 2012 | |
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| 701 | 1 | |a Аumalikova |b М. N. | |
| 701 | 1 | |a Timchenko |b N. A. |c physicist |c Professor of Tomsk Polytechnic University, Doctor of physical and mathematical sciences |f 1949- |g Nikolay Alekseevich |2 stltpush |3 (RuTPU)RU\TPU\pers\32004 | |
| 701 | 1 | |a Kuznetsov |b S. I. |c physicist |c associate professor of Tomsk polytechnic university, candidate of technical sciences (PhD) |f 1952- |g Sergey Ivanovich |2 stltpush |3 (RuTPU)RU\TPU\pers\30071 |4 070 | |
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| 701 | 1 | |a Pindurin |b V. F. | |
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