Аumalikova М. N., Timchenko N. A. Nikolay Alekseevich, Kuznetsov S. I. Sergey Ivanovich, Goldenberg B. G., Pindurin V. F., Litvin S. V., & Kanaev V. G. (2012). Manufacturing of regular microstructures by methods of LIGA - Technologies. 2012. https://doi.org/10.1109/IFOST.2012.6357553
Chicago Style (17th ed.) CitationАumalikova М. N., Timchenko N. A. Nikolay Alekseevich, Kuznetsov S. I. Sergey Ivanovich, Goldenberg B. G., Pindurin V. F., Litvin S. V., and Kanaev V. G. Manufacturing of Regular Microstructures by Methods of LIGA - Technologies. 2012, 2012. https://doi.org/10.1109/IFOST.2012.6357553.
MLA (9th ed.) CitationАumalikova М. N., et al. Manufacturing of Regular Microstructures by Methods of LIGA - Technologies. 2012, 2012. https://doi.org/10.1109/IFOST.2012.6357553.