Fundamentals of the Layer-by-Layer Chemical Analysis of Heterogeneous Samples Using Secondary Ion Energy-mass Spectrometry

Fundamentals of the Layer-by-Layer Chemical Analysis of Heterogeneous Samples Using Secondary Ion Energy-mass Spectrometry

Bibliographic Details
Parent link:Physics Procedia: Scientific Journal.— , 2008-
Vol. 66 : Conference on the Application of Accelerators in Research and Industry - CAARI 2014.— 2015.— [P. 298-304]
Corporate Author: Национальный исследовательский Томский политехнический университет (ТПУ) Физико-технический институт (ФТИ) Кафедра общей физики (ОФ)
Other Authors: Nikitenkov A. N. Aleksey Nikolaevich, Vilkhivskaya O. V. Olga Vladimirovna, Nikitenkov N. N. Nikolai Nikolaevich, Sypchenko V. S. Vladimir Sergeevich
Summary:Title screen
The experimental results presented in this paper demonstrate an opportunity for phase analysisof the surfacelayers of heterogeneous solidsusing the energy spectra of secondary ions (ESSI). The resultant ESSI from performing layer-by-layersputteringof thin-film systems using a stationary N2+ primary ion beam are presented and discussed. As examples of such studies, the depth distributions of the chemical compositions were studied on ZnO/Zn andInxAsyOz/InAs. An analysis of the simultaneous change in depth of both secondary molecular ion intensities and secondary atomic ion energy distributions (with reference to the target) enables the identification of separate phases.
Режим доступа: по договору с организацией-держателем ресурса
Published: 2015
Subjects:
электронный ресурс
труды учёных ТПУ
Online Access:http://dx.doi.org/10.1016/j.phpro.2015.05.038
Format: Electronic Book Chapter
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=643494

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