Umnov S. P. Sergey Pavlovich & Asainov O. Kh. Oleg Khaydarovich. (2015). Change Spectrum Characteristics Modification of Films Deposited by Magnetron Sputtering with the Assistance of Argon Ions Beam; IOP Conference Series: Materials Science and Engineering; Vol. 81 : Radiation-Thermal Effects and Processes in Inorganic Materials. 2015. https://doi.org/10.1088/1757-899X/81/1/012001
Chicago-Zitierstil (17. Ausg.)Umnov S. P. Sergey Pavlovich und Asainov O. Kh. Oleg Khaydarovich. Change Spectrum Characteristics Modification of Films Deposited by Magnetron Sputtering with the Assistance of Argon Ions Beam; IOP Conference Series: Materials Science and Engineering; Vol. 81 : Radiation-Thermal Effects and Processes in Inorganic Materials. 2015, 2015. https://doi.org/10.1088/1757-899X/81/1/012001.
MLA-Zitierstil (9. Ausg.)Umnov S. P. Sergey Pavlovich und Asainov O. Kh. Oleg Khaydarovich. Change Spectrum Characteristics Modification of Films Deposited by Magnetron Sputtering with the Assistance of Argon Ions Beam; IOP Conference Series: Materials Science and Engineering; Vol. 81 : Radiation-Thermal Effects and Processes in Inorganic Materials. 2015, 2015. https://doi.org/10.1088/1757-899X/81/1/012001.