Umnov S. P. Sergey Pavlovich & Asainov O. Kh. Oleg Khaydarovich. (2015). Change Spectrum Characteristics Modification of Films Deposited by Magnetron Sputtering with the Assistance of Argon Ions Beam; IOP Conference Series: Materials Science and Engineering; Vol. 81 : Radiation-Thermal Effects and Processes in Inorganic Materials. 2015. https://doi.org/10.1088/1757-899X/81/1/012001
Chicago Style (17th ed.) CitationUmnov S. P. Sergey Pavlovich and Asainov O. Kh. Oleg Khaydarovich. Change Spectrum Characteristics Modification of Films Deposited by Magnetron Sputtering with the Assistance of Argon Ions Beam; IOP Conference Series: Materials Science and Engineering; Vol. 81 : Radiation-Thermal Effects and Processes in Inorganic Materials. 2015, 2015. https://doi.org/10.1088/1757-899X/81/1/012001.
MLA (9th ed.) CitationUmnov S. P. Sergey Pavlovich and Asainov O. Kh. Oleg Khaydarovich. Change Spectrum Characteristics Modification of Films Deposited by Magnetron Sputtering with the Assistance of Argon Ions Beam; IOP Conference Series: Materials Science and Engineering; Vol. 81 : Radiation-Thermal Effects and Processes in Inorganic Materials. 2015, 2015. https://doi.org/10.1088/1757-899X/81/1/012001.