APA (7th ed.) Citation

Umnov S. P. Sergey Pavlovich & Asainov O. Kh. Oleg Khaydarovich. (2015). Change Spectrum Characteristics Modification of Films Deposited by Magnetron Sputtering with the Assistance of Argon Ions Beam; IOP Conference Series: Materials Science and Engineering; Vol. 81 : Radiation-Thermal Effects and Processes in Inorganic Materials. 2015. https://doi.org/10.1088/1757-899X/81/1/012001

Chicago Style (17th ed.) Citation

Umnov S. P. Sergey Pavlovich and Asainov O. Kh. Oleg Khaydarovich. Change Spectrum Characteristics Modification of Films Deposited by Magnetron Sputtering with the Assistance of Argon Ions Beam; IOP Conference Series: Materials Science and Engineering; Vol. 81 : Radiation-Thermal Effects and Processes in Inorganic Materials. 2015, 2015. https://doi.org/10.1088/1757-899X/81/1/012001.

MLA (9th ed.) Citation

Umnov S. P. Sergey Pavlovich and Asainov O. Kh. Oleg Khaydarovich. Change Spectrum Characteristics Modification of Films Deposited by Magnetron Sputtering with the Assistance of Argon Ions Beam; IOP Conference Series: Materials Science and Engineering; Vol. 81 : Radiation-Thermal Effects and Processes in Inorganic Materials. 2015, 2015. https://doi.org/10.1088/1757-899X/81/1/012001.

Warning: These citations may not always be 100% accurate.