Influence of Bias Parameters and Plasma Density on Vacuum Arc Macroparticle Accumulation

Influence of Bias Parameters and Plasma Density on Vacuum Arc Macroparticle Accumulation

Bibliografiske detaljer
Parent link:	Materials and Manufacturing Processes.— , 1986- Vol. 30, iss. 12.— 2015.— [P. 1471-1475]
Hovedforfatter:	Ryabchikov A. I. Aleksandr Ilyich
Andre forfattere:	Sivin D. O. Denis Olegovich, Bumagina A. I. Anna Ivanovna
Summary:	Title screen Several regularities of the accumulation of vacuum arc metal macroparticles (MP) on the sample on repetitively pulsed biasing (105 Hz, 7 µs, -0.5 kV to -3.5 kV) have been investigated. It has been shown that the substrate temperature plays a very important role in controlling the MP amounts on the sample. A possibility to change the metal particle number density on the substrate in the range from 105/cm2 to 107/cm2, depending on bias pulse parameters, sample temperature, and ion plasma saturation current density, has been demonstrated. The shape of MPs and their adhesion to the substrate surface depends strongly on the MP energy balance in a high-voltage space charge sheath. Режим доступа: по договору с организацией-держателем ресурса
Udgivet:	2015
Fag:	электронный ресурс труды учёных ТПУ
Online adgang:	http://dx.doi.org/10.1080/10426914.2015.1019094
Format:	Electronisk Book Chapter
KOHA link:	https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=642889

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