Influence of Bias Parameters and Plasma Density on Vacuum Arc Macroparticle Accumulation

Influence of Bias Parameters and Plasma Density on Vacuum Arc Macroparticle Accumulation

Bibliographic Details
Parent link:Materials and Manufacturing Processes.— , 1986-
Vol. 30, iss. 12.— 2015.— [P. 1471-1475]
Main Author: Ryabchikov A. I. Aleksandr Ilyich
Other Authors: Sivin D. O. Denis Olegovich, Bumagina A. I. Anna Ivanovna
Summary:Title screen
Several regularities of the accumulation of vacuum arc metal macroparticles (MP) on the sample on repetitively pulsed biasing (105 Hz, 7 µs, -0.5 kV to -3.5 kV) have been investigated. It has been shown that the substrate temperature plays a very important role in controlling the MP amounts on the sample. A possibility to change the metal particle number density on the substrate in the range from 105/cm2 to 107/cm2, depending on bias pulse parameters, sample temperature, and ion plasma saturation current density, has been demonstrated. The shape of MPs and their adhesion to the substrate surface depends strongly on the MP energy balance in a high-voltage space charge sheath.
Режим доступа: по договору с организацией-держателем ресурса
Language:English
Published: 2015
Subjects:
электронный ресурс
труды учёных ТПУ
Online Access:http://dx.doi.org/10.1080/10426914.2015.1019094
Format: Electronic Book Chapter
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=642889

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