The Vacancy Generation Influence on the Initial Stage of Ion Implantation

The Vacancy Generation Influence on the Initial Stage of Ion Implantation

Bibliographic Details
Parent link:Applied Mechanics and Materials: Scientific Journal
Vol. 1097 : Nanomaterials and Surface Technologies, Materials Applications.— 2015.— [P. 29-34]
Main Author: Parfenova E. S. Elena Sergeevna
Corporate Author: Национальный исследовательский Томский политехнический университет (ТПУ) Институт физики высоких технологий (ИФВТ) Кафедра физики высоких технологий в машиностроении (ФВТМ)
Other Authors: Knyazeva A. G. Anna Georgievna
Summary:Title screen
The coupled model is presented to describe the elements penetration into the surface layer of metal during the process of ion implantation. Mechanical stresses arising due to the interaction of particles with the surface affect the redistribution of the implanted impurity. In addition, the existence of vacancies in the metal surface and their generation under the stresses influence are taken into account. The kinetic law is written on the basis of the thermodynamics of irreversible processes. The solution had been found numerically. As a result, the distributions of impurity concentration and deformations have been obtained for various time moments. The comparison of the concentration profiles with vacancies and without their have been given.
Режим доступа: по договору с организацией-держателем ресурса
Published: 2015
Series:Surface and Coating Materials Technologies and Engineering
Subjects:
электронный ресурс
труды учёных ТПУ
вакансии
ионная имплантация
поверхностные слои
диффузия
упругие волны
численные решения
поверхности
Online Access:http://dx.doi.org/10.4028/www.scientific.net/AMR.1097.29
Format: Electronic Book Chapter
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=642867

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