Parfenova E. S. Elena Sergeevna & Knyazeva A. G. Anna Georgievna. (2015). The Vacancy Generation Influence on the Initial Stage of Ion Implantation. 2015. https://doi.org/10.4028/www.scientific.net/AMR.1097.29
Chicago Style (17th ed.) CitationParfenova E. S. Elena Sergeevna and Knyazeva A. G. Anna Georgievna. The Vacancy Generation Influence on the Initial Stage of Ion Implantation. 2015, 2015. https://doi.org/10.4028/www.scientific.net/AMR.1097.29.
MLA (9th ed.) CitationParfenova E. S. Elena Sergeevna and Knyazeva A. G. Anna Georgievna. The Vacancy Generation Influence on the Initial Stage of Ion Implantation. 2015, 2015. https://doi.org/10.4028/www.scientific.net/AMR.1097.29.
Warning: These citations may not always be 100% accurate.