Parfenova E. S. Elena Sergeevna & Knyazeva A. G. Anna Georgievna. (2015). The Vacancy Generation Influence on the Initial Stage of Ion Implantation; Applied Mechanics and Materials; Vol. 1097: Nanomaterials and Surface Technologies, Materials Applications. 2015. https://doi.org/10.4028/www.scientific.net/AMR.1097.29
Չիկագոյի ոճի (17րդ խմբ.) մեջբերումParfenova E. S. Elena Sergeevna and Knyazeva A. G. Anna Georgievna. The Vacancy Generation Influence on the Initial Stage of Ion Implantation; Applied Mechanics and Materials; Vol. 1097: Nanomaterials and Surface Technologies, Materials Applications. 2015, 2015. https://doi.org/10.4028/www.scientific.net/AMR.1097.29.
MLA (9րդ խմբ.) ՄեջբերումParfenova E. S. Elena Sergeevna and Knyazeva A. G. Anna Georgievna. The Vacancy Generation Influence on the Initial Stage of Ion Implantation; Applied Mechanics and Materials; Vol. 1097: Nanomaterials and Surface Technologies, Materials Applications. 2015, 2015. https://doi.org/10.4028/www.scientific.net/AMR.1097.29.